[raith] Can anyone share any experience on HSQ (negative-tone resist) ?

Donguk Nam dwnam at stanford.edu
Mon Feb 25 12:31:29 PST 2013


Dear Raith users,

I am wondering if anyone can share any recent information on HSQ, such as e-beam dosage, developing time, and etc?

I have been only using positive resists (zep & PMMA) so far, but want to try HSQ this time.

Can anyone please email me if you could share your recent experience on HSQ?

Best regards,
Donguk


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