[raith] Can anyone share any experience on HSQ (negative-tone resist) ?
dwnam at stanford.edu
Mon Feb 25 12:31:29 PST 2013
Dear Raith users,
I am wondering if anyone can share any recent information on HSQ, such as e-beam dosage, developing time, and etc?
I have been only using positive resists (zep & PMMA) so far, but want to try HSQ this time.
Can anyone please email me if you could share your recent experience on HSQ?
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