From kodama at stanford.edu  Fri Mar  1 22:09:38 2013
From: kodama at stanford.edu (Takashi Kodama)
Date: Fri, 1 Mar 2013 22:09:38 -0800 (PST)
Subject: [raith] Free just now till midnight
Message-ID: <1235590243.15203109.1362204578180.JavaMail.root@stanford.edu>

I am sorry for the late notice. I can not use my today's slot due to my upstream process failure.

From mmleczko at stanford.edu  Sat Mar  2 18:52:24 2013
From: mmleczko at stanford.edu (Michal Jakub Mleczko)
Date: Sat, 2 Mar 2013 18:52:24 -0800 (PST)
Subject: [raith]  Raith free early tonight
In-Reply-To: <315415450.434301.1361062735388.JavaMail.root@stanford.edu>
Message-ID: <730202032.25210232.1362279144606.JavaMail.root@stanford.edu>

Originally planned to write until 9, but had less samples available than expected.
Will be unloading in a few minutes.

- Mike

From norisato at stanford.edu  Mon Mar  4 01:06:17 2013
From: norisato at stanford.edu (Noriyuki Sato)
Date: Mon, 04 Mar 2013 01:06:17 -0800
Subject: [raith]  Raith free 1pm-4pm tomorrow
Message-ID: <51346409.6050306@stanford.edu>

Moved to earlier.

Noriyuki Sato

From wtzhao at stanford.edu  Mon Mar  4 08:38:21 2013
From: wtzhao at stanford.edu (Wenting Zhao)
Date: Mon, 4 Mar 2013 08:38:21 -0800 (PST)
Subject: [raith] Raith free 1pm-4pm tomorrow
In-Reply-To: <51346409.6050306@stanford.edu>
Message-ID: <2103994355.17369385.1362415101006.JavaMail.root@stanford.edu>

Taken. Thanks!

Best,
Wenting

----- Original Message -----
From: "Noriyuki Sato" <norisato at stanford.edu>
To: "raith" <raith at snf.stanford.edu>
Sent: Monday, March 4, 2013 1:06:17 AM
Subject: [raith]  Raith free 1pm-4pm tomorrow

Moved to earlier.

Noriyuki Sato
_______________________________________________
raith mailing list
raith at snf.stanford.edu
http://snf.stanford.edu/mailman/listinfo/raith

From dtschoen at stanford.edu  Mon Mar  4 09:53:27 2013
From: dtschoen at stanford.edu (David Schoen)
Date: Mon, 4 Mar 2013 09:53:27 -0800
Subject: [raith] Free 10:30-12:30 Today
Message-ID: <CALVXsuHNiMSS4-S6GHt-x8P6jUiqdYHmrDeyEA5tc=C=B6Vmew@mail.gmail.com>

Sorry for the short notice, I just have not quite finished my previous
processing.

David
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From toecutter4ranger at gmail.com  Mon Mar  4 11:11:14 2013
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Mon, 4 Mar 2013 11:11:14 -0800
Subject: [raith] James will not be at SNF today
Message-ID: <7B86311D-4F6F-4B7D-93DD-10BF41CB2A2B@gmail.com>

James will not be at SNF today Monday 
But should return Tuesday.
I am available by phone or SMS should anyone have questions.
James 

From steelxu at stanford.edu  Mon Mar  4 15:27:49 2013
From: steelxu at stanford.edu (Xiaoqing Xu)
Date: Mon, 4 Mar 2013 15:27:49 -0800 (PST)
Subject: [raith] raith released this Wed. 2-6pm
Message-ID: <27993125.12540760.1362439669430.JavaMail.root@stanford.edu>


From wtzhao at stanford.edu  Mon Mar  4 15:53:01 2013
From: wtzhao at stanford.edu (Wenting Zhao)
Date: Mon, 4 Mar 2013 15:53:01 -0800 (PST)
Subject: [raith] raith released this Wed. 2-6pm
In-Reply-To: <27993125.12540760.1362439669430.JavaMail.root@stanford.edu>
Message-ID: <1084452310.18378202.1362441181368.JavaMail.root@stanford.edu>

Taken. Thanks!

-------------------------------------------------- 
Wenting ZHAO, Ph.D
Postdoc Scholar, Cui Group
Materials Science and Engineering
476 Lomita Mall, McCullough Building Rm.228
Stanford, California 94305-4045
Email: wtzhao at stanford.edu
--------------------------------------------------

----- Original Message -----
From: "Xiaoqing Xu" <steelxu at stanford.edu>
To: "raith" <raith at snf.stanford.edu>
Sent: Monday, March 4, 2013 3:27:49 PM
Subject: [raith] raith released this Wed. 2-6pm


_______________________________________________
raith mailing list
raith at snf.stanford.edu
http://snf.stanford.edu/mailman/listinfo/raith

From toecutter4ranger at gmail.com  Wed Mar  6 11:12:14 2013
From: toecutter4ranger at gmail.com (James W Conway)
Date: Wed, 6 Mar 2013 11:12:14 -0800
Subject: [raith] No restrictions on acceleration voltages on the RAITH tool.
Message-ID: <CAGUEwbk5awrSAV007K_PBYraz3UKaaSfuKovOm9a=N9Ju5b+YQ@mail.gmail.com>

Greetings RAITH Users

I meant to post this two weeks ago...

Users are informed that there are currently  no restrictions on the
acceleration voltages that may be used on the Raith tool. The system vacuum
and emission levels are stable and the tip is fully conditioned and ready
for higher voltage operations.  Gun section base pressure = 5.7E-010 mbar
and System vacuum base 2.7E-006 mbar and stable.

*You may now use any voltage from 0.3 to 30 keV:*
Users working at acceleration voltages above 20 keV are recommended to
bring up the beam at 10 keV and allow the beam to stabilize for at least
ten minutes before bringing the acceleration voltage up to the higher
voltage. The intention of this approach is to allow the FE-Gun assembly,
the anode plate and the column liner tube assembly to briefly out-gas as it
comes up to higher temperature reducing the chances for a Extra High
Tension arc discharge, resulting in a EHT trip of the FE-Gun as you begin
moving across your sample surface.

*All Users are also reminded to please bake out their samples just before
loading into the system to desorb gas and solvents from the resist thin
film and your substrate.*

I normally use 90 to 100 degrees Celsius on a hot plate for 2 minutesl.
 Users report that it is also much easier to form contamination dots on
their samples after this treatment using spot mode to aid in focusing.

Thank you for your support!

James Conway
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From mmleczko at stanford.edu  Wed Mar  6 12:26:22 2013
From: mmleczko at stanford.edu (Michal Jakub Mleczko)
Date: Wed, 6 Mar 2013 12:26:22 -0800 (PST)
Subject: [raith] Raith Reservation released 9pm tonight
In-Reply-To: <730202032.25210232.1362279144606.JavaMail.root@stanford.edu>
Message-ID: <284008821.942814.1362601582683.JavaMail.root@stanford.edu>

Won't need the session.

Mike

From jwc at snf.stanford.edu  Wed Mar  6 17:29:51 2013
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 06 Mar 2013 17:29:51 -0800
Subject: [raith] Has anyone translated the RAITH Nanosuite version six into
 Mandarin or any other language?
Message-ID: <5137ED8F.3060401@snf.stanford.edu>

Good Evening,

By chance has anyone translated the RAITH Nanosuite version six 
operations sheet into Mandarin or any other language? (Japanese, Korean, 
or other languages...)
It may be useful for new Users to obtain a copy of the manual in native 
languages.  I have users inbound that don't speak or understand English 
well.
This would be very useful for my RAITH 150 Basic User class.

Best

James


From lindm at stanford.edu  Thu Mar  7 18:49:08 2013
From: lindm at stanford.edu (Dianmin Lin)
Date: Thu, 7 Mar 2013 18:49:08 -0800 (PST)
Subject: [raith] Raith free 7:30-9:30 tonight
Message-ID: <1106429827.4404825.1362710948332.JavaMail.root@stanford.edu>

Found a free session tomorrow morning

From mmleczko at stanford.edu  Sat Mar  9 15:22:28 2013
From: mmleczko at stanford.edu (Michal Jakub Mleczko)
Date: Sat, 9 Mar 2013 15:22:28 -0800 (PST)
Subject: [raith]  Session Released 7pm - Midnight Tonight
In-Reply-To: <730202032.25210232.1362279144606.JavaMail.root@stanford.edu>
Message-ID: <367799146.5994726.1362871348596.JavaMail.root@stanford.edu>

Samples not ready.

Sorry for the late notice.

Mike

From steelxu at stanford.edu  Tue Mar 12 19:58:43 2013
From: steelxu at stanford.edu (Xiaoqing Xu)
Date: Tue, 12 Mar 2013 19:58:43 -0700 (PDT)
Subject: [raith] raith released tomorrow morning 10-11am
Message-ID: <316989506.4870222.1363143523095.JavaMail.root@stanford.edu>

Will start later.

From toecutter4ranger at gmail.com  Thu Mar 14 14:08:15 2013
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Thu, 14 Mar 2013 14:08:15 -0700
Subject: [raith] Starting at three PM have to revisit my sample
Message-ID: <927431F2-CD1C-4E03-AC8E-4C9C7533435F@gmail.com>

Starting at three PM have to revisit my sample
The PMMA film on the nasty little piece came out poorly so I will try again...
Plan coming on Raith about 3 PM
James
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From jwc at snf.stanford.edu  Mon Mar 18 15:04:56 2013
From: jwc at snf.stanford.edu (James W. Conway)
Date: Mon, 18 Mar 2013 15:04:56 -0700
Subject: [raith] No more Ma-N Developer
In-Reply-To: <CAE+TuhofWJJ3v3voBP16PruSth5jOetYLhq9w1ROa7mySqGiog@mail.gmail.com>
References: <CAE+TuhofWJJ3v3voBP16PruSth5jOetYLhq9w1ROa7mySqGiog@mail.gmail.com>
Message-ID: <51478F88.1000704@snf.stanford.edu>

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From jwc at snf.stanford.edu  Mon Mar 18 16:32:28 2013
From: jwc at snf.stanford.edu (James W. Conway)
Date: Mon, 18 Mar 2013 16:32:28 -0700
Subject: [raith] No more ZEP
In-Reply-To: <945066992.1700949.1363644937902.JavaMail.root@stanford.edu>
References: <945066992.1700949.1363644937902.JavaMail.root@stanford.edu>
Message-ID: <5147A40C.9060505@snf.stanford.edu>

I see we are down to the last 10 to 15 ml! Still enough for a few more 
wafers, or a lot of pieces if everyone is careful in their dispenses.

A new bottle and batch of ZEP-520A on order.  I do not yet have a 
shipping or expected delivery date but it could likely be two to three 
weeks out from today at best.

Are you sure the material in the clear brown bottle is bad?!!  I 
examined it this morning and its not gelated or thickened at all. It 
might be fine unless you see it is not exposing properly.  Seemed like a 
lot of material was used up in the last few weeks...

Let s try one more exposure with the 1:1 to rule out the RIE system as 
the root problem....

JWC

On 3/18/2013 3:15 PM, Dianmin Lin wrote:
> Hi James,
>
> Today I end up using the old diluted ZEP, since the next two users need ZEP too, so they share the last few ZEP. The old diluted ZEP still has the problem of coating.
>
> Could you please let me know if when the new ZEP will be available?
>
> Thanks,
> Dianmin
>
> ----- Original Message -----
> From: "Dianmin Lin" <lindm at stanford.edu>
> To: "James W. Conway" <jwc at snf.stanford.edu>
> Sent: Monday, March 18, 2013 9:34:47 AM
> Subject: New ZEP
>
> Hi James,
>
> There is only a few drop of ZEP left. Could you please bring a new bottle of ZEP? I need to mix some diluted ZEP, since the previous bottle was found left in the yellow cabinet and I had problem of spin coating.
>
> Thanks a lot!
> Dianmin


From jwc at snf.stanford.edu  Mon Mar 18 17:24:34 2013
From: jwc at snf.stanford.edu (James W. Conway)
Date: Mon, 18 Mar 2013 17:24:34 -0700
Subject: [raith] ANNOUNCEMENT: Raith Group 55- Four Day Short Course for
 Basic RAITH 150 Users TOMORROW ==> Tuesday March 19 (11 - 6 PM) AND
 Wednesday March 20th (10 - 6 PM) and Thursday April 3rd,
 10 - 6 PM and Friday APril 5th 10 - 4 PM.
Message-ID: <5147B042.8010707@snf.stanford.edu>

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From jwc at snf.stanford.edu  Wed Mar 20 17:50:53 2013
From: jwc at snf.stanford.edu (James W. Conway)
Date: Wed, 20 Mar 2013 17:50:53 -0700
Subject: [raith] James will be out of the office Thursday and Friday
Message-ID: <514A596D.90901@snf.stanford.edu>

Greetings All

James will be out of the office Thursday and Friday returning Monday 
late morning as usual. I should be available by phone should you have 
questions.

Have a nice Spring Break

James

From norisato at stanford.edu  Thu Mar 21 17:05:58 2013
From: norisato at stanford.edu (Noriyuki Sato)
Date: Thu, 21 Mar 2013 17:05:58 -0700 (PDT)
Subject: [raith] raith released tomorrow 1-5pm
In-Reply-To: <176574201.38825279.1363910434846.JavaMail.root@stanford.edu>
Message-ID: <1672755303.38829461.1363910758852.JavaMail.root@stanford.edu>

--

Noriyuki Sato

From akumar10 at stanford.edu  Thu Mar 21 17:10:15 2013
From: akumar10 at stanford.edu (Archana Kumar)
Date: Thu, 21 Mar 2013 17:10:15 -0700 (PDT)
Subject: [raith] raith released tomorrow 1-5pm
In-Reply-To: <1672755303.38829461.1363910758852.JavaMail.root@stanford.edu>
Message-ID: <1837461201.9202378.1363911015630.JavaMail.root@stanford.edu>

I'll take some of that and move my reservation. Raith is now free 6-9pm tomorrow. 


Regards, 
Archana 
----- Original Message -----

From: "Noriyuki Sato" <norisato at stanford.edu> 
To: raith at snf.stanford.edu 
Sent: Thursday, March 21, 2013 5:05:58 PM 
Subject: [raith] raith released tomorrow 1-5pm 

-- 

Noriyuki Sato 
_______________________________________________ 
raith mailing list 
raith at snf.stanford.edu 
http://snf.stanford.edu/mailman/listinfo/raith 

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From dwnam at stanford.edu  Fri Mar 22 09:35:58 2013
From: dwnam at stanford.edu (Donguk Nam)
Date: Fri, 22 Mar 2013 09:35:58 -0700 (PDT)
Subject: [raith] Raith is free from 10:30am to 1pm
Message-ID: <399703644.12116417.1363970158390.JavaMail.root@stanford.edu>

Sample is not ready. Sorry for the late notice.

Donguk

From fanpy839 at stanford.edu  Mon Mar 25 17:26:54 2013
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Mon, 25 Mar 2013 17:26:54 -0700
Subject: [raith] E-spacer is out
Message-ID: <CADPrSwy1Pcwm-EKxSuaOrgOLtKSFtO+wKY6oWZtdJUGAtJ9j8w@mail.gmail.com>

Hi all,

Fyi, there is only a few drops left in the espacer bottle.

Pengyu
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From fanpy839 at stanford.edu  Tue Mar 26 15:04:02 2013
From: fanpy839 at stanford.edu (Pengyu Fan)
Date: Tue, 26 Mar 2013 15:04:02 -0700
Subject: [raith] Raith free till 7pm
Message-ID: <CADPrSwznsGjD_SybpRc=14urXF2Se9af5WQ-eLaou-tZN5iVAg@mail.gmail.com>

Upstream fails,  sorry for the late notice.
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From akumar10 at stanford.edu  Tue Mar 26 20:05:30 2013
From: akumar10 at stanford.edu (Archana Kumar)
Date: Tue, 26 Mar 2013 20:05:30 -0700 (PDT)
Subject: [raith] raith free wed 7-10am
Message-ID: <1197401504.2283198.1364353530233.JavaMail.root@stanford.edu>

Raith free tomorrow (Wed) 7-10am, sample not ready. 


Regards, 
Archana 
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From toecutter4ranger at gmail.com  Wed Mar 27 16:57:35 2013
From: toecutter4ranger at gmail.com (James W Conway)
Date: Wed, 27 Mar 2013 16:57:35 -0700
Subject: [raith] I will be finishing my session early tonight. System
 available after 5:15 PM
Message-ID: <CAGUEwbn-B+cO-LYB6w_M=95TGNpvt9tM=-jmf9XrL0-_9okqeA@mail.gmail.com>

Greeetings RAITH Users

I will be finishing my session early tonight. System available after 5:15
PM... James
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From dwnam at stanford.edu  Thu Mar 28 13:56:53 2013
From: dwnam at stanford.edu (Donguk Nam)
Date: Thu, 28 Mar 2013 13:56:53 -0700 (PDT)
Subject: [raith] Raith is free tomorrow from 4pm to 8pm
Message-ID: <22221671.16547488.1364504213798.JavaMail.root@stanford.edu>

Waiting for MaD 525 to arrive.

Donguk

From toecutter4ranger at gmail.com  Fri Mar 29 13:23:52 2013
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Fri, 29 Mar 2013 13:23:52 -0700
Subject: [raith] Finished early system available
Message-ID: <EAA2CCA9-DFB4-4F66-AA99-2A998D5F7D63@gmail.com>

Afternoon 
I'm Finished early system available
My sample was charging badly so I gave up at WF align
I'm unloading now 
First to enable has the system
Happy Holiday weekend
James 
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From toecutter4ranger at gmail.com  Fri Mar 29 13:27:32 2013
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Fri, 29 Mar 2013 13:27:32 -0700
Subject: [raith] Old expired bottle of ESPACER in fridge isn't working all
	that well
Message-ID: <58622009-AC73-42A4-8ED0-A5474B9F7B6B@gmail.com>

Greetings
We located the bottle that had been lost last year
It had been refrigerated but expired long ago

It worked slightly to reduce charging on 300 nm SIO2 on Si 
But not nearly as well as the normal material which is due in April 5 to 8th
Feel free to try what we have its the nearly full bottle
The old batch of good material as been used up

Best
James

From toecutter4ranger at gmail.com  Fri Mar 29 13:30:21 2013
From: toecutter4ranger at gmail.com (ToeCutter)
Date: Fri, 29 Mar 2013 13:30:21 -0700
Subject: [raith] Expired batch of MaN-2403 dated Jan 2011 is dead
Message-ID: <65BD9601-9CA5-45CE-A658-229467738A05@gmail.com>

Greetings
We ran two test of the old batch of MaN-2403 this week with unacceptable results. The material is dead and all feature are much larger than Critical Dimension of the patterns
A new batch of both the resist and it's developer MaD-525 are on order

Thank you

James 

From akumar10 at stanford.edu  Sun Mar 31 11:35:54 2013
From: akumar10 at stanford.edu (Archana Kumar)
Date: Sun, 31 Mar 2013 11:35:54 -0700 (PDT)
Subject: [raith] Raith released 12-3pm
Message-ID: <874996663.618101.1364754954459.JavaMail.root@stanford.edu>

Raith released 12-3pm today. Sample not ready in time, sorry for the late notice! 


Regards, 
Archana 
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