Aqua Regia Disposal...

[Mary Tang]

Hi all --

I spoke with Kevin -- I think this is covered.

Mary

Kevin Crabb wrote:
>
> Hello SNF Safety Folks,
>
> I am hoping to use aqua regia (mixture of 3:1 concentrated 
> hydrochloric acid to concentrated nitric acid) to remove platinum and 
> gold grid structures from my wafer. I was told it is okay to do this 
> at the wetbench general, as long as I collect my waste separately.
>
> However, after doing more research, it has come to my attention that 
> aqua regia will fume (it produces chlorine gas) for hours/days 
> (depending on the temperature, volume), and I was wondering how best 
> to deal with this. Would it be possible to leave the waste container 
> open in the fume hood until it finishes fuming? If not, is there a 
> vented bottle cap that could be used? Any information/suggestions on 
> how to handle this situation would be greatly appreciated. Thanks,
>
> Kevin
>
> kcrabb at stanford.edu <mailto:kcrabb at stanford.edu>
>
> PS—If it matters, I expect to only need ~200mL of the aqua regia mixture.
>


-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu