Problem savannah SNF 2010-12-14 12:41:32: heater #9 problem

cursive at snf.stanford.edu cursive at snf.stanford.edu
Tue Dec 14 12:41:32 PST 2010

Previous message: Comment savannah SNF 2010-12-09 13:45:00: replacing Zr precursor with Silanol precursor until shutdown
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Try to run Al2O3 150 degree C deposition.
Heater #9 can't reach 150 degree C.
It's alwyas 140 degree C

Previous message: Comment savannah SNF 2010-12-09 13:45:00: replacing Zr precursor with Silanol precursor until shutdown
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