From jprovine at snf.stanford.edu Fri Nov 5 02:40:23 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 5 Nov 2010 02:40:23 -0700 Subject: Comment savannah SNF 2010-11-05 02:40:21: changed W precursor for Zr Message-ID: I changed out the Bis (tert-butylimino) bis(dimethylamino)tungsten precursor for the tetrakis(ethylmethylamido)zirconium precursor. if you want the W precursor back on for an experiment, just let me know. From jprovine at snf.stanford.edu Sat Nov 6 15:17:03 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 6 Nov 2010 15:17:03 -0700 Subject: Comment savannah SNF 2010-11-06 15:17:03: NH3 source bottle is closed Message-ID: I have closed the NH3 source bottle for an experiment with the EE412 team nitride group. it will remain closed until i post a comment on coral and through the email list saying it has been reopened. to my knowledge only the EE412 group is trying to run nitrides currently so this should not be a problem...but if you want to run with NH3, please let me know and i'll make sure to get the source opened up again and set up for you. j From yihsuan at snf.stanford.edu Sun Nov 7 05:33:37 2010 From: yihsuan at snf.stanford.edu (yihsuan at snf.stanford.edu) Date: Sun, 7 Nov 2010 05:33:37 -0800 Subject: Problem savannah SNF 2010-11-07 05:33:37: Uknown fuzzy things in savvanah chamber Message-ID: Found the unkown fuzzy things in the chamber before running the deposition. The base pressure still keeps at 160mTorr. Had no idea what those fuzzy were. Please check it. Thanks. From jprovine at snf.stanford.edu Sun Nov 7 07:19:09 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 7 Nov 2010 07:19:09 -0800 Subject: Problem savannah SNF 2010-11-07 05:33:37: Uknown fuzzy things in savvanah chamber Message-ID: particles galore in the chamber. i vacuumed them out. but the pump sounds bad, like some particles got down into it. i will switch to the oil pump monday when i can get it from the maintenance guys. the system is ok to use. the base pressure is ok, but the pump is much louder than normal, and i'll switch it asap. From jprovine at snf.stanford.edu Sun Nov 7 15:51:21 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 7 Nov 2010 15:51:21 -0800 Subject: Shutdown savannah SNF 2010-11-07 15:51:20: dry pump out of commission Message-ID: dry pump is making a terrible noise and new particles have appeared in the chamber since i cleaned and checked it this morning. the pump sounds way worse than just a 10 hours ago. monday morning, when the maintenance guys get here, i'll be able to get the recently cleaned oil pump and put that on the system. the particle source is clearly something to do with the pump also because no depositions were run since my clean-up this morning. From jprovine at snf.stanford.edu Mon Nov 8 08:49:09 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 8 Nov 2010 08:49:09 -0800 Subject: Comment savannah SNF 2010-11-08 08:49:08: pump replacement Message-ID: i swapped the oil pump back on to savannah this morning (thanks to ted for getting me some fomblin 25/6). over saturday night to sunday morning the dry pump got really loud and starting spewing particles back into the chamber. i cleaned the chamber sunday morning, but without any depositions being run, the pump got much louder and more particle appeared in the chamber (that is the point i decided they were likely coming from the pump and not a user). this is the same oil pump we had on the system up until a month ago. it has just returned from repair. i'm pumping and baking with the oil pump now and will release the tool to users if the system passes a quick quality check. thanks to yi-hsuan, ze, and wooshik for providing information about how the system was behaving over the weekend, and for alerting me asap when things were amiss. j a note on the particles: these are not flakes of deposited material coming off the walls of the chamber, the particles were shards often more than a mm in size. at first it looked some someone had a wafer shatter and did a shoddy job cleaning it up. From jprovine at snf.stanford.edu Mon Nov 8 14:54:45 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 8 Nov 2010 14:54:45 -0800 Subject: Problem savannah SNF 2010-11-08 14:54:45: no ammonia source Message-ID: a leak was detected in the ammonia source line. it has been removed and is being fixed/reworked. the ammonia line is currently capped and not available. rough estimate of 1 week for ammonia to return. From jprovine at snf.stanford.edu Mon Nov 8 14:56:56 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 8 Nov 2010 14:56:56 -0800 Subject: Shutdown savannah SNF 2010-11-07 15:51:20: dry pump out of commission Message-ID: dry pump has been replaced with the oil pump. pump down and base pressure are fine. particles potentially from dry pump have been removed from the system. test run of 200 cycles of Al2O3 with standard recipe has been performed with film thickness of ~225A of oxide (old wafer without HF dip so likely significant thermal oxide). system is free for oxide processing. From jennyhu at snf.stanford.edu Sun Nov 28 18:16:54 2010 From: jennyhu at snf.stanford.edu (jennyhu at snf.stanford.edu) Date: Sun, 28 Nov 2010 18:16:54 -0800 Subject: Problem savannah SNF 2010-11-28 18:16:53: Chamber is flaking heavily Message-ID: I'm not sure how to clean it, but the chamber was flaking very heavily before my run. I'm worried that these particles may be falling onto samples. From jprovine at snf.stanford.edu Mon Nov 29 13:48:57 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 29 Nov 2010 13:48:57 -0800 Subject: Problem savannah SNF 2010-11-28 18:16:53: Chamber is flaking heavily Message-ID: chamber wiped down and vacuumed for flakes. the system will be bead blasted back to the chamber metal over the christmas shutdown.