Problem savannah SNF 2010-11-07 05:33:37: Uknown fuzzy things in savvanah chamber

yihsuan at snf.stanford.edu yihsuan at snf.stanford.edu
Sun Nov 7 05:33:37 PST 2010


Found the unkown fuzzy things in the chamber before running the deposition. The base pressure still keeps at 160mTorr. Had no idea what those fuzzy were. Please check it. Thanks.




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