Shutdown savannah SNF 2010-11-07 15:51:20: dry pump out of commission

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Sun Nov 7 15:51:21 PST 2010


dry pump is making a terrible noise and new particles have appeared in the chamber since i cleaned and checked it this morning.  the pump sounds way worse than just a 10 hours ago.  monday morning, when the maintenance guys get here, i'll be able to get the recently cleaned oil pump and put that on the system.
the particle source is clearly something to do with the pump also because no depositions were run since my clean-up this morning.




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