Shutdown savannah SNF 2010-11-07 15:51:20: dry pump out of commission

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Mon Nov 8 14:56:56 PST 2010


dry pump has been replaced with the oil pump.
pump down and base pressure are fine.  particles potentially from dry pump have been removed from the system.
test run of 200 cycles of Al2O3 with standard recipe has been performed with film thickness of ~225A of oxide (old wafer without HF dip so likely significant thermal oxide).
system is free for oxide processing.




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