From jprovine at snf.stanford.edu Mon Oct 4 16:47:59 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 4 Oct 2010 16:47:59 -0700 Subject: Comment savannah SNF 2010-10-04 16:47:58: base pressure Message-ID: change of o-ring had no effect on base pressure. i'll work with maintainence to try two other fixes for the base pressure: 1) we may have excess deposition on the pressure gauge and need to recalibrate that. OR 2) we can replace the pump oil. updates to follow. for now be careful to monitor the base pressure when processing. (currently reading around 135mTorr. From jasonlin at snf.stanford.edu Thu Oct 7 16:00:13 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Thu, 7 Oct 2010 16:00:13 -0700 Subject: Comment savannah SNF 2010-10-07 16:00:13: Titania thickness Message-ID: Previously, 50 cycles gave 33-34 Angstroms pretty consistently. Today, 50 cycles gave 31A. Pressure seems to not be as steady as before. From wslee at snf.stanford.edu Tue Oct 12 20:58:14 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 12 Oct 2010 20:58:14 -0700 Subject: Comment savannah SNF 2010-10-12 20:58:14: Pressure readings are off Message-ID: The base pressure while pumped down continues to rise (about 166mTorr). Also, the pressure reading when vented is now 260 Torr whereas it used to reach a value above 700 Torr. From jasonlin at snf.stanford.edu Wed Oct 13 00:07:51 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 13 Oct 2010 00:07:51 -0700 Subject: Problem savannah SNF 2010-10-13 00:07:50: Pressure during deposition Message-ID: Pressure during deposition of TiO2 is lower than before. Used to go to >700mT. Now it's more like 300mT for each pulse (H2O and TDMAT). Could be a false pressure reading (see Scott's comment). Woollam gave 30A, lower than the normal 33-34A. From jprovine at snf.stanford.edu Wed Oct 13 10:42:15 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 13 Oct 2010 10:42:15 -0700 Subject: Problem savannah SNF 2010-10-13 00:07:50: Pressure during deposition Message-ID: i could not replicate the spurious pressure values seen by scott or jason on 10/12/2010, during morning runs with titania or hafnia during training. the oil pump was taken out for cleaning/repair/refill and in its place is a dry scroll pump. the base pressure is 160mTorr at 5sccm flow, which may be a limit of the pump. please continue to monitor the base pressure to see that it remains steady or if it keeps increasing. meanwhile, i'm calibrating a new pressure gauge in case that is the issue. From jprovine at snf.stanford.edu Wed Oct 13 15:38:28 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 13 Oct 2010 15:38:28 -0700 Subject: Shutdown savannah SNF 2010-10-13 15:38:27: pressure gauge is broken Message-ID: the pressure gauge is not functioning. the pressure reading is steady despite the chamber changing from atmosphere and some level of pumpdown (cannot life the lid). without accurate pressure monitoring, the system should not be run. i'm getting a new pressure gauge ready asap. From jprovine at snf.stanford.edu Fri Oct 15 17:45:39 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 15 Oct 2010 17:45:39 -0700 Subject: Shutdown savannah SNF 2010-10-13 15:38:27: pressure gauge is broken Message-ID: new pressure gauge installed. looks good and base pressure is ~50mTorr. atmospheric pressure reading correctly at 770Torr. currently running test deposition for release of system to users. test deposition will be done around 9pm. check back on status then. From jprovine at snf.stanford.edu Fri Oct 15 17:46:09 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 15 Oct 2010 17:46:09 -0700 Subject: Comment savannah SNF 2010-10-12 20:58:14: Pressure readings are off Message-ID: new pressure gauge installed. continue to monitor pressure for anomalous behavior, please. From jprovine at snf.stanford.edu Fri Oct 15 17:46:57 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 15 Oct 2010 17:46:57 -0700 Subject: Comment savannah SNF 2010-09-23 16:41:18: base pressure rising over time Message-ID: new pressure gauge installed. base pressure measured at ~50mTorr for 5sccm flow j From jprovine at snf.stanford.edu Fri Oct 15 17:47:41 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 15 Oct 2010 17:47:41 -0700 Subject: Comment savannah SNF 2010-10-04 16:47:58: base pressure Message-ID: new pressure gauge installed and dry pump installed while oil pump is being refurbished. base pressure is 50mTorr at 5sccm From ryhuang at snf.stanford.edu Wed Oct 20 18:24:47 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Wed, 20 Oct 2010 18:24:47 -0700 Subject: Comment savannah SNF 2010-10-20 18:24:46: new BSL pressure ~95mTorr Message-ID: Post-deposition, the new BSL pressure is ~95mTorr at ~5.3sccm. Robert From horvath at snf.stanford.edu Mon Oct 25 08:00:24 2010 From: horvath at snf.stanford.edu (horvath at snf.stanford.edu) Date: Mon, 25 Oct 2010 08:00:24 -0700 Subject: Comment savannah SNF 2010-10-25 08:00:23: Standby recipe should be loaded Message-ID: Hello, I found the Savannah this morning without the Standby recipe running - heaters turned off, control software not running. It's not only harmful for the system, but also steals precious processing time while waiting for the system to heat up and stabilize. Please remember to load the standby recipe when your process is completed. Thanks! Attila From jasonlin at snf.stanford.edu Fri Oct 29 19:45:51 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 29 Oct 2010 19:45:51 -0700 Subject: Problem savannah SNF 2010-10-29 19:45:51: Out of water? Message-ID: While running TiO2 recipe, did not see H2O pulse. Out of water precursor? From jprovine at snf.stanford.edu Sat Oct 30 06:10:51 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 30 Oct 2010 06:10:51 -0700 Subject: Problem savannah SNF 2010-10-29 19:45:51: Out of water? Message-ID: Water cylinder was empty. refilled with DI water and ran a pulse train for check. Everything looks good. I did not run a test deposition because the pulses look similar to before. When i came to replace the water, i found the heater jacket off of the water cylinder. this does not cause any harm to the system, but no one should be removing heater jackets or poking around in the cabinet except with my supervision. happy processing.