Comment savannah SNF 2010-10-04 16:47:58: base pressure

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Mon Oct 4 16:47:59 PDT 2010


change of o-ring had no effect on base pressure.  i'll work with maintainence to try two other fixes for the base pressure:
1) we may have excess deposition on the pressure gauge and need to recalibrate that.
OR
2) we can replace the pump oil.
updates to follow.  for now be careful to monitor the base pressure when processing. (currently reading around 135mTorr.




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