Problem savannah SNF 2010-10-13 00:07:50: Pressure during deposition

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Oct 13 00:07:51 PDT 2010


Pressure during deposition of TiO2 is lower than before.
Used to go to >700mT.  Now it's more like 300mT for each pulse (H2O and TDMAT).  Could be a false pressure reading (see Scott's comment).  Woollam gave 30A, lower than the normal 33-34A.




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