Problem savannah SNF 2010-10-13 00:07:50: Pressure during deposition

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Wed Oct 13 10:42:15 PDT 2010


i could not replicate the spurious pressure values seen by scott or jason on 10/12/2010, during morning runs with titania or hafnia during training.  
the oil pump was taken out for cleaning/repair/refill and in its place is a dry scroll pump.  the base pressure is 160mTorr at 5sccm flow, which may be a limit of the pump.  please continue to monitor the base pressure to see that it remains steady or if it keeps increasing.  
meanwhile, i'm calibrating a new pressure gauge in case that is the issue.




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