From jprovine at snf.stanford.edu Wed Sep 8 19:08:08 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 8 Sep 2010 19:08:08 -0700 Subject: Problem savannah SNF 2010-09-08 19:08:08: blown fuse on ebox Message-ID: a fuse is out on the ebox. savannah is down until it can be replace (thursday morning is the estimate. From jprovine at snf.stanford.edu Thu Sep 9 15:46:13 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 9 Sep 2010 15:46:13 -0700 Subject: Problem savannah SNF 2010-09-08 19:08:08: blown fuse on ebox Message-ID: fuse replaced. system recovered base pressure of 80mTorr at 5sccm flow. currently bring manifold, exhaust, and chamber temperatures back to process level. i'm running an empty chamber coat of 100A of Al2O3. at that point the system is free to use. recovery qual to be run tomorrow (friday). From jprovine at snf.stanford.edu Thu Sep 23 16:41:19 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:41:19 -0700 Subject: Comment savannah SNF 2010-09-23 16:41:18: base pressure rising over time Message-ID: over the last several weeks i have notice the base pressure (at 5sccm flow) has risen to 129mTorr. it is still stable through recipes, but this is a possible sign of o-ring issues. i will replace the o-ring soon. From jprovine at snf.stanford.edu Thu Sep 23 16:42:44 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 23 Sep 2010 16:42:44 -0700 Subject: Comment savannah SNF 2010-09-23 16:42:43: Hafnium precursor installed Message-ID: the hafnium precursor (TDMAHf) has been installed in the slot formerly held by the zirconium precursor (TMEAZr). HfO2 recipe under test, ask J for recipe location if you are interested in running prior to reported data. From horvath at snf.stanford.edu Wed Sep 29 18:48:12 2010 From: horvath at snf.stanford.edu (horvath at snf.stanford.edu) Date: Wed, 29 Sep 2010 18:48:12 -0700 Subject: Comment savannah SNF 2010-09-29 18:48:11: NH3 odor Message-ID: I opened the valve to the ammonia cylinder and heard a hissing sound and smelled strong ammonia odor. I closed the cylinder and did not run any process. Please check it out if there is a leak somewhere in the line. From jprovine at snf.stanford.edu Thu Sep 30 00:47:09 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 30 Sep 2010 00:47:09 -0700 Subject: Comment savannah SNF 2010-09-23 16:42:43: Hafnium precursor installed Message-ID: From jprovine at snf.stanford.edu Thu Sep 30 09:29:59 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 30 Sep 2010 09:29:59 -0700 Subject: Comment savannah SNF 2010-09-29 18:48:11: NH3 odor Message-ID: When opening the ammonia regulator, do not tighten it open or open to the stop point. this actually pushes the regulator valve physically beyond its "maximum opening" and causes a leak. instead just open the regulator until it spins freely. there is a lot of play in this middle region and the needle valve controls the ultimate input, so anywhere in the freely turning regime of the regulator knob is fine for operation. i'll do better in the training going forward about making this clear.