Problem savannah SNF 2010-09-08 19:08:08: blown fuse on ebox

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Thu Sep 9 15:46:13 PDT 2010


fuse replaced.
system recovered base pressure of 80mTorr at 5sccm flow.
currently bring manifold, exhaust, and chamber temperatures back to process level.
i'm running an empty chamber coat of 100A of Al2O3.  at that point the system is free to use.  
recovery qual to be run tomorrow (friday).




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