Comment savannah SNF 2010-09-23 16:41:18: base pressure rising over time

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Thu Sep 23 16:41:19 PDT 2010


over the last several weeks i have notice the base pressure (at 5sccm flow) has risen to 129mTorr.  it is still stable through recipes, but this is a possible sign of o-ring issues.  i will replace the o-ring soon.




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