Comment savannah SNF 2010-09-23 16:42:43: Hafnium precursor installed

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Thu Sep 23 16:42:44 PDT 2010


the hafnium precursor (TDMAHf) has been installed in the slot formerly held by the zirconium precursor (TMEAZr).  HfO2 recipe under test, ask J for recipe location if you are interested in running prior to reported data.




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