Comment savannah SNF 2010-09-23 16:42:43: Hafnium precursor installed

[jprovine at snf.stanford.edu]

the hafnium precursor (TDMAHf) has been installed in the slot formerly held by the zirconium precursor (TMEAZr).  HfO2 recipe under test, ask J for recipe location if you are interested in running prior to reported data.