From jprovine at snf.stanford.edu Sat Apr 2 09:57:10 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 2 Apr 2011 09:57:10 -0700 Subject: Problem savannah SNF 2011-04-02 09:57:10: TMA precursor empty Message-ID: TMA precursor empty and needs to be changed. as soon as it is changed i'll clear this problem. delay is the need to get the backup bottle from the gas bunker. From jprovine at snf.stanford.edu Mon Apr 4 12:21:34 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 4 Apr 2011 12:21:34 -0700 Subject: Problem savannah SNF 2011-04-02 09:57:10: TMA precursor empty Message-ID: new TMA precursor installed. monthly qual for al2o3 yielded acceptable results (109A for 100 cycles with no native oxide compensation). From jprovine at snf.stanford.edu Wed Apr 6 08:19:49 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 6 Apr 2011 08:19:49 -0700 Subject: Comment savannah SNF 2011-04-06 08:19:48: precursor change Message-ID: diethylzinc is off the system for the next week. tetrakisdimethylamido-titanium is on the system for the next two weeks. all standard recipes and the standby recipe have been updated. remember to check your personal recipes that use these chemistries. From jprovine at snf.stanford.edu Wed Apr 6 08:20:17 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 6 Apr 2011 08:20:17 -0700 Subject: Comment savannah SNF 2011-03-30 17:32:43: Yttrium precursor added Message-ID: new precursor change From jprovine at snf.stanford.edu Wed Apr 13 11:13:06 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 13 Apr 2011 11:13:06 -0700 Subject: Comment savannah SNF 2011-04-06 08:19:48: precursor change Message-ID: outdated From jprovine at snf.stanford.edu Wed Apr 13 11:14:15 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 13 Apr 2011 11:14:15 -0700 Subject: Comment savannah SNF 2011-04-13 11:14:15: precursor change 4/13 Message-ID: Yttria source out and diethylzinc is in. all standard recipes have been updated including the standby. personal recipes should be checked for correctness before running. j From zeyuan at snf.stanford.edu Sat Apr 16 04:10:18 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Sat, 16 Apr 2011 04:10:18 -0700 Subject: Problem savannah SNF 2011-04-16 04:10:15: Pressure Gauge has gone Message-ID: The chamber probably is still of normal pressure but the value from pressure gauge went up high. This happened after a short Al2O3 deposition. From jprovine at snf.stanford.edu Sat Apr 16 10:07:00 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 16 Apr 2011 10:07:00 -0700 Subject: Problem savannah SNF 2011-04-16 04:10:15: Pressure Gauge has gone Message-ID: pressure gauge reset. monday will recalibrate gauge, but this one should be ok through the weekend. please watch the gauge carefully. From jprovine at snf.stanford.edu Wed Apr 20 14:55:44 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 20 Apr 2011 14:55:44 -0700 Subject: Comment savannah SNF 2011-04-20 14:55:43: precursor changed & pressure gauge changed Message-ID: TDMA-Ti is out...Yttrium precursor back on. standby and standard recipes updated. also freshly calibrated pressure gauge installed. (Thanks elmer.) From jprovine at snf.stanford.edu Wed Apr 20 14:55:59 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 20 Apr 2011 14:55:59 -0700 Subject: Comment savannah SNF 2011-04-13 11:14:15: precursor change 4/13 Message-ID: now outdated. From mtang at snf.stanford.edu Tue Apr 26 12:26:11 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 26 Apr 2011 12:26:11 -0700 Subject: Shutdown savannah SNF 2011-04-26 12:26:11: Message-ID: From jprovine at snf.stanford.edu Tue Apr 26 13:33:52 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Apr 2011 13:33:52 -0700 Subject: Problem savannah SNF 2011-04-26 13:33:51: pump issue Message-ID: the shutdown was for a smell in the vicinity of the savannah. pump exhaust has some issues and was loose. new clamp added. continuing to look at pump exhaust issue. From jprovine at snf.stanford.edu Tue Apr 26 20:58:01 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Apr 2011 20:58:01 -0700 Subject: Shutdown savannah SNF 2011-04-26 12:26:11: Message-ID: smell turns out not to be related to savannah. checked all recipes and precursors for pulse consistency. everything is ok (except Yttrium which has not been working anyways). From jprovine at snf.stanford.edu Tue Apr 26 20:58:18 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Apr 2011 20:58:18 -0700 Subject: Problem savannah SNF 2011-04-26 13:33:51: pump issue Message-ID: ok for now. pump will be serviced soon. From jprovine at snf.stanford.edu Thu Apr 28 11:16:51 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 28 Apr 2011 11:16:51 -0700 Subject: Comment savannah SNF 2011-04-28 11:16:50: precursor change Message-ID: yttrium precursor out, TDMA-Ti precursor installed. all standard recipes are updated.