Problem savannah SNF 2011-04-16 04:10:15: Pressure Gauge has gone

zeyuan at snf.stanford.edu zeyuan at snf.stanford.edu
Sat Apr 16 04:10:18 PDT 2011


The chamber probably is still of normal pressure but the value from pressure gauge went up high. This happened after a short Al2O3 deposition. 




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