From jprovine at snf.stanford.edu Mon Aug 1 16:33:04 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 1 Aug 2011 16:33:04 -0700 Subject: Shutdown savannah SNF 2011-07-27 18:44:17: ebox not responding Message-ID: ebox back online after adjusting fuse and power connections. many thanks to allita horvath for his help in the repair, which largely consisted of a massage and gentle encouragement to the connectors. system is heating up and test depositions will be run prior to release. From jprovine at snf.stanford.edu Mon Aug 1 16:33:27 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 1 Aug 2011 16:33:27 -0700 Subject: Comment savannah SNF 2011-07-29 10:46:17: update on computer and ebox Message-ID: computer good. ebox good. From jprovine at snf.stanford.edu Mon Aug 1 16:33:40 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 1 Aug 2011 16:33:40 -0700 Subject: Comment savannah SNF 2011-07-25 20:16:20: shutdown update Message-ID: no longer shutdown. From jprovine at snf.stanford.edu Mon Aug 1 20:53:57 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 1 Aug 2011 20:53:57 -0700 Subject: Problem savannah SNF 2011-07-27 18:03:00: error message Message-ID: software and ebox working fine. From jprovine at snf.stanford.edu Tue Aug 2 17:31:54 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 2 Aug 2011 17:31:54 -0700 Subject: Comment savannah SNF 2011-08-02 17:31:53: system online for use Message-ID: the savannah is back online for use. thank you to attila horvath for running a test alumina deposition this morning. the hafnia source needs refilling, the only titania source is on fiji-l currently. i'll install new precursors tomorrow when i can get access to the gas vault, but currently the system will run alumina only of the standard recipes. happy processing. From jprovine at snf.stanford.edu Wed Aug 3 12:50:47 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 3 Aug 2011 12:50:47 -0700 Subject: Comment savannah SNF 2011-08-03 12:50:47: installed Zr precursor and Ta precursor Message-ID: two precursors installed. standby recipe and standard recipes are all up to date. From jprovine at snf.stanford.edu Thu Aug 4 08:53:45 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 4 Aug 2011 08:53:45 -0700 Subject: Comment savannah SNF 2011-08-04 08:53:44: precursor swap Message-ID: Ta precursor out...Hf precursor installed From jprovine at snf.stanford.edu Thu Aug 4 08:54:08 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 4 Aug 2011 08:54:08 -0700 Subject: Comment savannah SNF 2011-08-03 12:50:47: installed Zr precursor and Ta precursor Message-ID: Ta out...Hf in From jprovine at snf.stanford.edu Sun Aug 7 13:57:20 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 7 Aug 2011 13:57:20 -0700 Subject: Comment savannah SNF 2011-08-07 13:57:20: zirconia precursor removed Message-ID: zirconia precursor removed because it is empty. new one on order. From jprovine at snf.stanford.edu Fri Aug 12 19:06:11 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 12 Aug 2011 19:06:11 -0700 Subject: Comment savannah SNF 2011-08-12 19:06:10: precursor change Message-ID: TDMA-Hf moved to Fiji-R and DEZ installed From jprovine at snf.stanford.edu Fri Aug 12 19:06:25 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 12 Aug 2011 19:06:25 -0700 Subject: Comment savannah SNF 2011-08-07 13:57:20: zirconia precursor removed Message-ID: cleared. From jprovine at snf.stanford.edu Fri Aug 12 19:06:31 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 12 Aug 2011 19:06:31 -0700 Subject: Comment savannah SNF 2011-08-04 08:53:44: precursor swap Message-ID: outdated From jprovine at snf.stanford.edu Fri Aug 12 19:06:40 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 12 Aug 2011 19:06:40 -0700 Subject: Comment savannah SNF 2011-08-02 17:31:53: system online for use Message-ID: outdated From jprovine at snf.stanford.edu Thu Aug 18 07:54:55 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 18 Aug 2011 07:54:55 -0700 Subject: Comment savannah SNF 2011-08-18 07:54:54: precursor change Message-ID: TDMA-Ti moved to Fiji-L. more TDMA-Ti on order. From jprovine at snf.stanford.edu Mon Aug 22 10:56:51 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 22 Aug 2011 10:56:51 -0700 Subject: Comment savannah SNF 2011-08-12 19:06:10: precursor change Message-ID: updated From jprovine at snf.stanford.edu Mon Aug 22 10:57:21 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 22 Aug 2011 10:57:21 -0700 Subject: Comment savannah SNF 2011-08-18 07:54:54: precursor change Message-ID: TDMA-Hf installed on savannah from Fiji-R. more TDMA-Hf on order From jprovine at snf.stanford.edu Wed Aug 24 10:12:18 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 24 Aug 2011 10:12:18 -0700 Subject: Comment savannah SNF 2011-08-24 10:12:17: precursor change Message-ID: TMA off and TDMA-Ti on From jprovine at snf.stanford.edu Thu Aug 25 22:46:31 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 25 Aug 2011 22:46:31 -0700 Subject: Comment savannah SNF 2011-08-25 22:46:31: precursor change Message-ID: TDMA-Ti moved to Fiji-L and TMA installed. From cfchiang at snf.stanford.edu Sun Aug 28 13:31:02 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Sun, 28 Aug 2011 13:31:02 -0700 Subject: Comment savannah SNF 2011-08-28 13:31:02: Flake? Message-ID: After venting and openning the chamber, found a piece of curled film flake sitting on top of one of the two processed wafers. Suspect the flake came from the film peeled from the chamber.