Comment savannah SNF 2011-08-02 17:31:53: system online for use

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Tue Aug 2 17:31:54 PDT 2011


the savannah is back online for use.  thank you to attila horvath for running a test alumina deposition this morning.  the hafnia source needs refilling, the only titania source is on fiji-l currently.  i'll install new precursors tomorrow when i can get access to the gas vault, but currently the system will run alumina only of the standard recipes.  happy processing.




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