Comment savannah SNF 2011-08-28 13:31:02: Flake?

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Sun Aug 28 13:31:02 PDT 2011


After venting and openning the chamber, found a piece of curled film flake sitting on top of one of the two processed wafers. Suspect the flake came from the film peeled from the chamber.




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