From horvath at snf.stanford.edu Wed Jul 6 19:09:28 2011 From: horvath at snf.stanford.edu (horvath at snf.stanford.edu) Date: Wed, 6 Jul 2011 19:09:28 -0700 Subject: Problem savannah SNF 2011-07-06 19:09:27: overpressure Message-ID: Base pressure is around 320mT. Tried running HfO2 exposure mode. When stop valve is closed and the H2O pulse is already in the chamber, the pressure rises and exceeds threshold limit (N2 flow should be 0 and it is around 2sccm - valve failure?). Tried to restart the recipe but the problem comes up again. One occasion the pressure rose above atmospheric pressure, that's when I decided to leave the tool. From jprovine at snf.stanford.edu Thu Jul 7 09:31:07 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 7 Jul 2011 09:31:07 -0700 Subject: Problem savannah SNF 2011-07-07 09:31:07: ammonia is off-line pending facilities upgrade Message-ID: the facilities upgrade originally scheduled for today needs to be rescheduled. the ammonia precursor is off-line pending the completion/reschedule of that work since the line takes so long to clear. all other precursors are on and functioning. From junam at snf.stanford.edu Sun Jul 10 00:22:13 2011 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 10 Jul 2011 00:22:13 -0700 Subject: Problem savannah SNF 2011-07-10 00:22:12: pressure too high error Message-ID: while running standard Al2O3 deposition recipe, "pressure too high" error occurred and process aborted. From jprovine at snf.stanford.edu Sun Jul 10 12:10:05 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 10 Jul 2011 12:10:05 -0700 Subject: Problem savannah SNF 2011-07-10 00:22:12: pressure too high error Message-ID: ran program today without pressure issue and got appropriate dep rate of 1.0A/cycle. the pump is going out for a rebuild asap, which may solve this intermittant problem. i do not know why it alarmed in junam's run, but repeating or restarting the process is the best solution for now. From jprovine at snf.stanford.edu Tue Jul 12 11:59:36 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 12 Jul 2011 11:59:36 -0700 Subject: Shutdown savannah SNF 2011-07-12 11:59:35: facilties work ongoing Message-ID: facilities work ongoing From jprovine at snf.stanford.edu Wed Jul 13 12:54:23 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 13 Jul 2011 12:54:23 -0700 Subject: Comment savannah SNF 2011-07-13 12:54:22: testing system post facilities work Message-ID: hello all, i'm testing the system, in particular the new ammonia line + purifier, following the facilities work. i will announce when the tool is ready for use again and it will be turned to green if all the processes check out. j From jprovine at snf.stanford.edu Thu Jul 14 15:33:13 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 14 Jul 2011 15:33:13 -0700 Subject: Shutdown savannah SNF 2011-07-12 11:59:35: facilties work ongoing Message-ID: system is on-line for oxide processing. nitride processing and the ammonia line are still off-line following the facilities work. facilities work included 1. the enclosure of the precursor cabinet 2. fitting the precursor cabinet with exhaust 3. switching from the ammonia lecture bottle to the house ammonia line 4. installing an O2 purifier on the ammonia line. From jprovine at snf.stanford.edu Thu Jul 14 15:37:05 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 14 Jul 2011 15:37:05 -0700 Subject: Comment savannah SNF 2011-07-13 12:54:22: testing system post facilities work Message-ID: oxide processing is in spec and clear to use. nitride processing is waiting still. From horvath at snf.stanford.edu Fri Jul 15 09:27:28 2011 From: horvath at snf.stanford.edu (horvath at snf.stanford.edu) Date: Fri, 15 Jul 2011 09:27:28 -0700 Subject: Problem savannah SNF 2011-07-15 09:27:27: fuse blown Message-ID: Fuse blew (10A/32V), Jim H. replaced it with a 10A/250V fuse. System is up and running, but may need an original fuse. From jprovine at snf.stanford.edu Wed Jul 20 14:56:08 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 20 Jul 2011 14:56:08 -0700 Subject: Shutdown savannah SNF 2011-07-20 14:56:07: control computer not powering on Message-ID: the computer that communicates with the ebox for the savannah is not powering up. power supply issue possible. without the control computer the system cannot function. i'll update as soon as i know anything more. From jprovine at snf.stanford.edu Mon Jul 25 20:16:21 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 25 Jul 2011 20:16:21 -0700 Subject: Comment savannah SNF 2011-07-25 20:16:20: shutdown update Message-ID: the power supply and motherboard need to be replaced. after the necessary penance of talking with tech support, the warranty has been renewed so replacement parts will be delivered this week. in the meantime i've asked cambridge nanotech to supply a backup of the savannah program and i'll install that on a temporary computer to get the system back online. i'll update again when the backup computer is online and the system is ready for use again. From jprovine at snf.stanford.edu Tue Jul 26 14:31:27 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Jul 2011 14:31:27 -0700 Subject: Shutdown savannah SNF 2011-07-20 14:56:07: control computer not powering on Message-ID: a backup computer installed while waiting for power supply replacement on desktop. the system is baking out now and will be available over the next few days but because of the temporary fix i would like to meet with each user as they start their runs. From jprovine at snf.stanford.edu Tue Jul 26 14:31:44 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Jul 2011 14:31:44 -0700 Subject: Problem savannah SNF 2011-07-15 09:27:27: fuse blown Message-ID: fuse replaced with standard fuse From jprovine at snf.stanford.edu Tue Jul 26 14:32:09 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Jul 2011 14:32:09 -0700 Subject: Comment savannah SNF 2011-06-06 16:53:24: precursor change Message-ID: outdated...check precursor configuration file. From jprovine at snf.stanford.edu Tue Jul 26 14:32:46 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 26 Jul 2011 14:32:46 -0700 Subject: Problem savannah SNF 2011-07-06 19:09:27: overpressure Message-ID: pump rebuilt. From cursive at snf.stanford.edu Wed Jul 27 18:03:00 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 27 Jul 2011 18:03:00 -0700 Subject: Problem savannah SNF 2011-07-27 18:03:00: error message Message-ID: software can't connect to ALD From jprovine at snf.stanford.edu Wed Jul 27 18:44:17 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 27 Jul 2011 18:44:17 -0700 Subject: Shutdown savannah SNF 2011-07-27 18:44:17: ebox not responding Message-ID: the ebox (the electronics control box that drives all the heaters and valves) is not responding. power is present from the wall line, fuses are fine and new, but the system will not power up. i'll pull the ebox tomorrow to look further at what might be wrong. From jprovine at snf.stanford.edu Fri Jul 29 10:46:17 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 29 Jul 2011 10:46:17 -0700 Subject: Comment savannah SNF 2011-07-29 10:46:17: update on computer and ebox Message-ID: the computer has been repaired. a new power supply and motherboard were installed. also the hard drive was "loosely connected," which was also addressed. the ebox issue remains unsolved and a service called was placed with cambridge nanotech yesterday.