Problem savannah SNF 2011-07-06 19:09:27: overpressure

horvath at snf.stanford.edu horvath at snf.stanford.edu
Wed Jul 6 19:09:28 PDT 2011


Base pressure is around 320mT. Tried running HfO2 exposure mode. When stop valve is closed and the H2O pulse is already in the chamber, the pressure rises and exceeds threshold limit (N2 flow should be 0 and it is around 2sccm - valve failure?). Tried to restart the recipe but the problem comes up again. One occasion the pressure rose above atmospheric pressure, that's when I decided to leave the tool. 




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