From jasonlin at snf.stanford.edu  Sun Jun  5 21:47:53 2011
From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu)
Date: Sun, 5 Jun 2011 21:47:53 -0700
Subject: Problem savannah SNF 2011-06-05 21:47:52: Titanium precursor empty
Message-ID: <mailman.96.1356282996.4515.savannah-pcs@snf.stanford.edu>




From jprovine at snf.stanford.edu  Mon Jun  6 16:52:27 2011
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Mon, 6 Jun 2011 16:52:27 -0700
Subject: Comment savannah SNF 2011-05-31 19:14:49: visible particles
Message-ID: <mailman.97.1356282996.4515.savannah-pcs@snf.stanford.edu>

vacuumed the system.  watch for particles and clean as necessary.  please let me know what you observe.



From jprovine at snf.stanford.edu  Mon Jun  6 16:52:36 2011
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Mon, 6 Jun 2011 16:52:36 -0700
Subject: Comment savannah SNF 2011-05-25 10:22:37: change precursor
Message-ID: <mailman.98.1356282996.4515.savannah-pcs@snf.stanford.edu>

outdated



From jprovine at snf.stanford.edu  Mon Jun  6 16:53:25 2011
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Mon, 6 Jun 2011 16:53:25 -0700
Subject: Comment savannah SNF 2011-06-06 16:53:24: precursor change
Message-ID: <mailman.99.1356282996.4515.savannah-pcs@snf.stanford.edu>

new TDMA-Ti installed.
bis(tert-DMA)bis(DM)-W installed.



From jprovine at snf.stanford.edu  Mon Jun  6 16:55:45 2011
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Mon, 6 Jun 2011 16:55:45 -0700
Subject: Problem savannah SNF 2011-06-05 21:47:52: Titanium precursor empty
Message-ID: <mailman.100.1356282996.4515.savannah-pcs@snf.stanford.edu>

new titanium precursor installed



From ksuralik at snf.stanford.edu  Wed Jun 22 14:55:14 2011
From: ksuralik at snf.stanford.edu (ksuralik at snf.stanford.edu)
Date: Wed, 22 Jun 2011 14:55:14 -0700
Subject: Problem savannah SNF 2011-06-22 14:55:14: Lost chip in system
Message-ID: <mailman.101.1356282996.4515.savannah-pcs@snf.stanford.edu>

Chip flew out of carrier wafer during the pump down of the chamber. The chip was not found within the reaction chamber. The chip is probably within the Savannah system.



From jprovine at snf.stanford.edu  Wed Jun 22 17:01:50 2011
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Wed, 22 Jun 2011 17:01:50 -0700
Subject: Problem savannah SNF 2011-06-22 14:55:14: Lost chip in system
Message-ID: <mailman.102.1356282996.4515.savannah-pcs@snf.stanford.edu>

chip stuck in exhaust filter.  pumping is working fine.