From sipark at snf.stanford.edu Fri May 6 00:45:45 2011 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Fri, 6 May 2011 00:45:45 -0700 Subject: Problem savannah SNF 2011-05-06 00:45:44: Reactor pressure problem Message-ID: The recipe was stopped because of rector pressure problem twice. Reactor pressure is aroung 500mmtorr(avobe 250). From sipark at snf.stanford.edu Fri May 6 00:48:04 2011 From: sipark at snf.stanford.edu (sipark at snf.stanford.edu) Date: Fri, 6 May 2011 00:48:04 -0700 Subject: Problem savannah SNF 2011-05-06 00:48:04: Particle on top of sample Message-ID: I found some particles on top of sample after venting chamber. From jprovine at snf.stanford.edu Fri May 6 09:04:04 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 6 May 2011 09:04:04 -0700 Subject: Comment savannah SNF 2011-04-20 14:55:43: precursor changed & pressure gauge changed Message-ID: outdated From jprovine at snf.stanford.edu Fri May 6 09:04:10 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 6 May 2011 09:04:10 -0700 Subject: Comment savannah SNF 2011-04-28 11:16:50: precursor change Message-ID: outdated From jprovine at snf.stanford.edu Fri May 6 09:04:57 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 6 May 2011 09:04:57 -0700 Subject: Comment savannah SNF 2011-05-06 09:04:56: precursor change Message-ID: TEMA-Zr on. DiethylZn off. no planned precursor changes until late May. request precursor changes as needed. From jprovine at snf.stanford.edu Fri May 6 09:06:39 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 6 May 2011 09:06:39 -0700 Subject: Problem savannah SNF 2011-05-06 00:45:44: Reactor pressure problem Message-ID: user did not run the standby. n2 throttle valve set full open and pump on, this caused the change in base pressure. all heaters found in off state. system is fine, but currently baking out. it should be fine by 10am. From jprovine at snf.stanford.edu Fri May 6 09:07:39 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 6 May 2011 09:07:39 -0700 Subject: Problem savannah SNF 2011-05-06 00:48:04: Particle on top of sample Message-ID: wiped down chamber and did not loosen any material. i found one large particle that looks like a wafer chip (broken off piece). From jcdoll at snf.stanford.edu Thu May 19 20:39:02 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Thu, 19 May 2011 20:39:02 -0700 Subject: Problem savannah SNF 2011-05-19 20:39:01: system won't pump down Message-ID: when i arrived at the tool, alduser was completely logged out and the control software wasn't running, so all of the temperature were at ambient and standby wasn't running. i tried pumping down the chamber, but the pressure won't change. i was able to vent and confirmed that nothing was obstructing the o-ring. the pump is running. not sure what else to check/do from a cold startup. From jcdoll at snf.stanford.edu Thu May 19 20:54:19 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Thu, 19 May 2011 20:54:19 -0700 Subject: Comment savannah SNF 2011-05-19 20:54:19: ok after warming up Message-ID: see my previous note. the system is behaving normally since i brought the temperatures back up. From jprovine at snf.stanford.edu Sun May 22 16:23:17 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 22 May 2011 16:23:17 -0700 Subject: Problem savannah SNF 2011-05-19 20:39:01: system won't pump down Message-ID: system fine after restart and warm up From jprovine at snf.stanford.edu Sun May 22 16:23:34 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 22 May 2011 16:23:34 -0700 Subject: Comment savannah SNF 2011-05-19 20:54:19: ok after warming up Message-ID: everything fine. From jprovine at snf.stanford.edu Wed May 25 10:22:37 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 25 May 2011 10:22:37 -0700 Subject: Comment savannah SNF 2011-05-25 10:22:37: change precursor Message-ID: TEMA-Zr out...DEZ in From jprovine at snf.stanford.edu Wed May 25 10:22:47 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 25 May 2011 10:22:47 -0700 Subject: Comment savannah SNF 2011-05-06 09:04:56: precursor change Message-ID: outdated From zeyuan at snf.stanford.edu Wed May 25 11:56:47 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Wed, 25 May 2011 11:56:47 -0700 Subject: Problem savannah SNF 2011-05-25 11:56:46: A lot of particles found in chamber Message-ID: Need clean up From jprovine at snf.stanford.edu Wed May 25 14:25:34 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 25 May 2011 14:25:34 -0700 Subject: Problem savannah SNF 2011-05-25 11:56:46: A lot of particles found in chamber Message-ID: vacuumed out particles and wiped down chamber From jasonlin at snf.stanford.edu Wed May 25 21:06:59 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 25 May 2011 21:06:59 -0700 Subject: Shutdown savannah SNF 2011-05-25 21:06:58: Pressure gauge Message-ID: Pressure gauge always displays about 2400 Torr, even with chamber pumped down. The chamber is below atm for sure since it doesn't open with a gentle tug on the handle. Unable to run any recipe, including standby recipe, since it gives an overpressure error. From jprovine at snf.stanford.edu Thu May 26 13:51:16 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 26 May 2011 13:51:16 -0700 Subject: Shutdown savannah SNF 2011-05-25 21:06:58: Pressure gauge Message-ID: pressure gauge reset. system operational From su1 at snf.stanford.edu Mon May 30 00:15:09 2011 From: su1 at snf.stanford.edu (su1 at snf.stanford.edu) Date: Mon, 30 May 2011 00:15:09 -0700 Subject: Problem savannah SNF 2011-05-30 00:15:08: Pressure guage Message-ID: the pressure guage shows wrong values. It showed a very low pressure when the chamber was open and some transients when it was being pumped down. From jprovine at snf.stanford.edu Mon May 30 08:51:18 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 30 May 2011 08:51:18 -0700 Subject: Problem savannah SNF 2011-05-30 00:15:08: Pressure guage Message-ID: pressure gauge reset. whomever reset the pressure gauge should have cleared the problem report at the same time. From jcdoll at snf.stanford.edu Tue May 31 19:14:50 2011 From: jcdoll at snf.stanford.edu (jcdoll at snf.stanford.edu) Date: Tue, 31 May 2011 19:14:50 -0700 Subject: Comment savannah SNF 2011-05-31 19:14:49: visible particles Message-ID: i noticed some particles around the chamber edge after completing my run. either i've just never noticed them before or they're new. what's the preferred method for cleaning them out? From jprovine at stanford.edu Tue May 31 21:13:46 2011 From: jprovine at stanford.edu (J Provine) Date: Tue, 31 May 2011 21:13:46 -0700 Subject: Comment savannah SNF 2011-05-31 19:14:49: visible particles In-Reply-To: <20110601021450.BCB3A51A5@smtp-unencrypted.stanford.edu> References: <20110601021450.BCB3A51A5@smtp-unencrypted.stanford.edu> Message-ID: joey et al, you can wipe down the chamber with a dry tech cloth. be careful of the heat. also be careful not to abraid the o-ring. this can best be avoided by not touching the o-ring with the wipe. also you can use the house vacuum like for innotec (there is a vacuum port next to the large 4100 rta machine across the aisle from savannah). always cover the vacuum tip with a clean wipe (with a hole opened in it). make sure only the clean wipe touches the chamber. if you feel uncomfortable or uncertain about any of these instructions, please do not try to clean the chamber. instead ask for help. i will be out of town at a conference from the morning of june 1 through early on june 4th. if i can make time to come in tonight, i'll clean the chamber and recalibrate the pressure gauge before i go. i'll note whatever i manage to accomplish on coral. j On Tue, May 31, 2011 at 7:14 PM, wrote: > i noticed some particles around the chamber edge after completing my run. > either i've just never noticed them before or they're new. what's the > preferred method for cleaning them out? > > -------------- next part -------------- An HTML attachment was scrubbed... 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