Problem savannah SNF 2011-05-19 20:39:01: system won't pump down

jcdoll at jcdoll at
Thu May 19 20:39:02 PDT 2011

when i arrived at the tool, alduser was completely logged out and the control software wasn't running, so all of the temperature were at ambient and standby wasn't running. i tried pumping down the chamber, but the pressure won't change. i was able to vent and confirmed that nothing was obstructing the o-ring. the pump is running. not sure what else to check/do from a cold startup.

More information about the savannah-pcs mailing list