Problem savannah SNF 2011-05-19 20:39:01: system won't pump down

jcdoll at snf.stanford.edu jcdoll at snf.stanford.edu
Thu May 19 20:39:02 PDT 2011


when i arrived at the tool, alduser was completely logged out and the control software wasn't running, so all of the temperature were at ambient and standby wasn't running. i tried pumping down the chamber, but the pressure won't change. i was able to vent and confirmed that nothing was obstructing the o-ring. the pump is running. not sure what else to check/do from a cold startup.




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