From zeyuan at snf.stanford.edu Sun Oct 9 00:28:15 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Sun, 9 Oct 2011 00:28:15 -0700 Subject: Comment savannah SNF 2011-10-09 00:28:14: ON doesn't light up Message-ID: the ON LED doesn't come up when the tool is enabled. From jprovine at snf.stanford.edu Wed Oct 12 18:47:55 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Wed, 12 Oct 2011 18:47:55 -0700 Subject: Comment savannah SNF 2011-10-09 00:28:14: ON doesn't light up Message-ID: it is not hooked up to anything. From jprovine at snf.stanford.edu Sat Oct 22 15:57:37 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 22 Oct 2011 15:57:37 -0700 Subject: Comment savannah SNF 2011-10-22 15:57:36: TDMA-Ti precursor off line until sunday (10.23) evening Message-ID: using source on fiji2. From jprovine at snf.stanford.edu Sun Oct 23 18:21:46 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 23 Oct 2011 18:21:46 -0700 Subject: Problem savannah SNF 2011-10-23 18:21:45: ALD line 3 (currently Ti) offline Message-ID: in moving the TDMA-Ti back from the fiji2, i could not achieve a good vacuum seal with the vcr ring. the TDMA-Ti precursor is still manually closed and thus not flowing. i'll look into this more during the week. From joem at snf.stanford.edu Tue Oct 25 15:21:40 2011 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Tue, 25 Oct 2011 15:21:40 -0700 Subject: Shutdown savannah SNF 2011-10-25 15:21:40: software locked up - tool down Message-ID: My last run aborted for an overpressure condition (>250 T). The pressure is reading 3000+ T and I cannot pump the system down or download a recipe. System is sitting at ATM. I'll see if someone can look at it. Joe From joem at snf.stanford.edu Tue Oct 25 15:59:08 2011 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Tue, 25 Oct 2011 15:59:08 -0700 Subject: Comment savannah SNF 2011-10-25 15:59:08: heaters are stabilizing Message-ID: Labview program running the software was stopped. Restarted now. Pressure gauge needed to be reset. System heaters are stabilizing now. Tool should be ok for use after temperatures stabilize.. Joe From jprovine at snf.stanford.edu Tue Oct 25 17:53:19 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 25 Oct 2011 17:53:19 -0700 Subject: Shutdown savannah SNF 2011-10-25 15:21:40: software locked up - tool down Message-ID: fixed. somehow the labview control program had been stopped. everything worked when restarted. From jprovine at snf.stanford.edu Tue Oct 25 17:53:28 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 25 Oct 2011 17:53:28 -0700 Subject: Comment savannah SNF 2011-10-25 15:59:08: heaters are stabilizing Message-ID: fixed. From jprovine at snf.stanford.edu Mon Oct 31 14:06:32 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 31 Oct 2011 14:06:32 -0700 Subject: Problem savannah SNF 2011-07-07 09:31:07: ammonia is off-line pending facilities upgrade Message-ID: ammonia line back on. pulses confirmed and look good. leak check satisfactory.