From jprovine at snf.stanford.edu Fri Sep 9 09:29:29 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Fri, 9 Sep 2011 09:29:29 -0700 Subject: Shutdown savannah SNF 2011-09-09 09:29:28: control computer is down Message-ID: the control computer is down. it will not power up. this is different from the issue of 5 weeks ago in that the power supply is ok, which can be determined by the power to the USB peripherals. instead this is likely an issue with the motherboard. dell technical support will be here to replace the board by tuesday the 13th...hopefully sooner. if anyone knows anything about the savannah usage over the last week, please let me know. From jprovine at snf.stanford.edu Tue Sep 13 06:29:41 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 13 Sep 2011 06:29:41 -0700 Subject: Shutdown savannah SNF 2011-09-09 09:29:28: control computer is down Message-ID: computer back online...baking out system and doing test runs before release to users. From jprovine at snf.stanford.edu Tue Sep 13 06:30:27 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 13 Sep 2011 06:30:27 -0700 Subject: Comment savannah SNF 2011-09-13 06:30:27: pending test runs...released to users tuesday afternoon Message-ID: if the test depositions come out in spec, the system will be released to users tuesday afternoon. From jprovine at snf.stanford.edu Tue Sep 13 16:52:08 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 13 Sep 2011 16:52:08 -0700 Subject: Comment savannah SNF 2011-08-28 13:31:02: Flake? Message-ID: vacuumed chamber From jprovine at snf.stanford.edu Tue Sep 13 16:52:16 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 13 Sep 2011 16:52:16 -0700 Subject: Comment savannah SNF 2011-08-24 10:12:17: precursor change Message-ID: outdated From jprovine at snf.stanford.edu Tue Sep 13 16:52:24 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 13 Sep 2011 16:52:24 -0700 Subject: Comment savannah SNF 2011-08-25 22:46:31: precursor change Message-ID: logged From jprovine at snf.stanford.edu Tue Sep 13 16:53:32 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Tue, 13 Sep 2011 16:53:32 -0700 Subject: Comment savannah SNF 2011-09-13 06:30:27: pending test runs...released to users tuesday afternoon Message-ID: everything looks good. hafnia and alumina tests fine. hafnia came out a little low in deposition rate (.93A/cycle instead of 1.0A/cycle). further tests to continue to tomorrow, but the system is up for users. for critical thicknesses of hafnia, run a test wafer first. From jprovine at snf.stanford.edu Mon Sep 26 10:40:40 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 26 Sep 2011 10:40:40 -0700 Subject: Comment savannah SNF 2011-09-26 10:40:40: update on ammonia line Message-ID: the newly installed hard ammonia line is not fully sealed. ammonia has not been introduced to the line yet because of this issue. it will be leak checked and sealed, then tested to be brought back online. this is not expected to happen until october. From jasonlin at snf.stanford.edu Mon Sep 26 17:20:18 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 26 Sep 2011 17:20:18 -0700 Subject: Comment savannah SNF 2011-09-26 17:20:17: Heater 10 Message-ID: Heater 10 stays at 143 when the setpoint is 150 From jprovine at snf.stanford.edu Thu Sep 29 06:58:44 2011 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Thu, 29 Sep 2011 06:58:44 -0700 Subject: Comment savannah SNF 2011-09-26 17:20:17: Heater 10 Message-ID: this is common and consistent since the cabinet was enclosed and exhausted. the heater is working a high duty cycle but with the airflow through the cabinet the heater is not able to make 150C. better insulation on the manifold may help. it should not affect processes as all our precursors are kept well below 140C also.