Comment savannah SNF 2011-09-13 06:30:27: pending test runs...released to users tuesday afternoon

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Tue Sep 13 16:53:32 PDT 2011


everything looks good.  hafnia and alumina tests fine.  hafnia came out a little low in deposition rate (.93A/cycle instead of 1.0A/cycle).  further tests to continue to tomorrow, but the system is up for users.  for critical thicknesses of hafnia, run a test wafer first.




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