Comment savannah SNF 2011-09-13 06:30:27: pending test runs...released to users tuesday afternoon

jprovine at jprovine at
Tue Sep 13 16:53:32 PDT 2011

everything looks good.  hafnia and alumina tests fine.  hafnia came out a little low in deposition rate (.93A/cycle instead of 1.0A/cycle).  further tests to continue to tomorrow, but the system is up for users.  for critical thicknesses of hafnia, run a test wafer first.

More information about the savannah-pcs mailing list