Shutdown savannah SNF 2012-09-12 16:22:51: cannot maintain vacuum at 20sccm

mmrincon at snf.stanford.edu mmrincon at snf.stanford.edu
Sun Dec 23 09:16:36 PST 2012

Previous message: Shutdown savannah SNF 2012-09-12 16:22:51: cannot maintain vacuum at 20sccm
Next message: Comment savannah SNF 2012-09-13 18:21:05: HfO2 precursor request
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

limit changed to 250 Torr (software default was not same operating limit we had been running at).  tool back up!

Previous message: Shutdown savannah SNF 2012-09-12 16:22:51: cannot maintain vacuum at 20sccm
Next message: Comment savannah SNF 2012-09-13 18:21:05: HfO2 precursor request
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the savannah-pcs mailing list