Comment savannah SNF 2012-10-29 11:23:32: Hf precursor request

yiwu at snf.stanford.edu yiwu at snf.stanford.edu
Sun Dec 23 09:16:36 PST 2012


Could you please fill the Hf precursor in addition to Al, Ti, DI water on savannah? I want to deposit AlOx, TiOx and HfOx for different wafers. Thank you very much!



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