Comment savannah SNF 2012-11-02 13:30:37: Al2O3

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Sun Dec 23 09:16:36 PST 2012


Can we have TMA and DI water precursors for tonight?  Currently there is no Al2O3 availability on either of the 3 ALD tools.



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