Comment savannah SNF 2012-11-28 18:06:40: Run out of TMA precursor

yiwu at snf.stanford.edu yiwu at snf.stanford.edu
Sun Dec 23 09:16:36 PST 2012


I ran 50 cycles of AlOx deposition and didn't see any Al pressure pulses. After deposition, the oxide thickness on bare silicon wafer is equal to native silicon oxide thickness (~15A). That means no alumina deposited on the wafer.



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