From mmrincon at stanford.edu Wed Mar 6 13:05:08 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Wed, 6 Mar 2013 13:05:08 -0800 (PST) Subject: [savannah-pcs] Comment savannah SNF 2013-02-28 11:28:22: al2o3 for wednesday and rest of week Message-ID: <32284881.50.1362603908573.JavaMail.coral@snc-coraldb.stanford.edu> request met From mcalarrudo at rambus.com Mon Mar 11 13:26:20 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Mon, 11 Mar 2013 13:26:20 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-11 13:26:20: Message-ID: <4398981.33.1363033580979.JavaMail.coral@snc-coraldb.stanford.edu> Need Hafnia From mcalarrudo at rambus.com Mon Mar 11 13:27:04 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Mon, 11 Mar 2013 13:27:04 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-11 13:27:03: Message-ID: <7479614.34.1363033624123.JavaMail.coral@snc-coraldb.stanford.edu> Need Hafnia From mcalarrudo at rambus.com Mon Mar 11 13:27:38 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Mon, 11 Mar 2013 13:27:38 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-11 13:27:37: Message-ID: <19850299.35.1363033658203.JavaMail.coral@snc-coraldb.stanford.edu> Need Hafnia From liyuhung at stanford.edu Tue Mar 12 11:50:28 2013 From: liyuhung at stanford.edu (liyuhung at stanford.edu) Date: Tue, 12 Mar 2013 11:50:28 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-12 11:50:27: Need to grow Al2O3 Message-ID: <12490175.28.1363114228487.JavaMail.coral@snc-coraldb.stanford.edu> Need to grow ~40nm-thick Al2O3 on 3/13 From mmrincon at stanford.edu Tue Mar 12 12:19:50 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Tue, 12 Mar 2013 12:19:50 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-11 13:26:20: Message-ID: <23696802.30.1363115990976.JavaMail.coral@snc-coraldb.stanford.edu> request outdated From mmrincon at stanford.edu Tue Mar 12 12:20:17 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Tue, 12 Mar 2013 12:20:17 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-12 12:20:16: Ta precursor request Message-ID: <14607708.31.1363116017041.JavaMail.coral@snc-coraldb.stanford.edu> For mtang reservation on Thursday From emross at hmc.edu Tue Mar 12 23:52:21 2013 From: emross at hmc.edu (emross at hmc.edu) Date: Tue, 12 Mar 2013 23:52:21 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-12 23:52:20: DEZ precursor request Message-ID: <9915979.13.1363157541168.JavaMail.coral@snc-coraldb.stanford.edu> for 3/18-22, please :) From dasgupta at stanford.edu Wed Mar 13 18:46:22 2013 From: dasgupta at stanford.edu (dasgupta at stanford.edu) Date: Wed, 13 Mar 2013 18:46:22 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-13 18:46:21: DEZ and TDMAT request for Friday 03/15 Message-ID: <20124593.33.1363225582492.JavaMail.coral@snc-coraldb.stanford.edu> From mmrincon at stanford.edu Thu Mar 14 11:06:49 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 14 Mar 2013 11:06:49 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-14 11:06:49: precursor status Message-ID: <12040505.36.1363284409521.JavaMail.coral@snc-coraldb.stanford.edu> 0- DI 1- TDMA-Ti (bottle 022813) 2- Zn (bottle DEZ1) 3- Ta (bottle 1) 4- TMA (bottle 1) 5- TDMA-Hf (bottle 1) From mmrincon at stanford.edu Thu Mar 14 11:06:58 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 14 Mar 2013 11:06:58 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-11 13:27:03: Message-ID: <30946171.37.1363284418552.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Thu Mar 14 11:07:04 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 14 Mar 2013 11:07:04 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-11 13:27:37: Message-ID: <924476.38.1363284424577.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Thu Mar 14 11:07:11 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 14 Mar 2013 11:07:11 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-12 12:20:16: Ta precursor request Message-ID: <15308919.39.1363284431603.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Thu Mar 14 11:07:17 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Thu, 14 Mar 2013 11:07:17 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-12 11:50:27: Need to grow Al2O3 Message-ID: <12501545.40.1363284437629.JavaMail.coral@snc-coraldb.stanford.edu> request met From alsune at stanford.edu Sun Mar 17 14:38:41 2013 From: alsune at stanford.edu (alsune at stanford.edu) Date: Sun, 17 Mar 2013 14:38:41 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-17 14:38:41: TMA precursor for 20th, March Message-ID: <12609015.74.1363556321559.JavaMail.coral@snc-coraldb.stanford.edu> Dear Michelle, Would it be possible get TMA precursor for Wednesday 20th March? I know the precursor is currently on the savannah but just want to make sure it is available on Wednesday. Best, Wooshik (alsune) From mmrincon at stanford.edu Mon Mar 18 11:13:03 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Mon, 18 Mar 2013 11:13:03 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-13 18:46:21: DEZ and TDMAT request for Friday 03/15 Message-ID: <26225949.92.1363630383079.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Fri Mar 22 15:16:48 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 22 Mar 2013 15:16:48 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-17 14:38:41: TMA precursor for 20th, March Message-ID: <22064538.112.1363990608518.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Fri Mar 22 15:16:56 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 22 Mar 2013 15:16:56 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-03-12 23:52:20: DEZ precursor request Message-ID: <21544209.113.1363990616546.JavaMail.coral@snc-coraldb.stanford.edu> request met From mmrincon at stanford.edu Fri Mar 22 15:17:00 2013 From: mmrincon at stanford.edu (mmrincon at stanford.edu) Date: Fri, 22 Mar 2013 15:17:00 -0700 (PDT) Subject: [savannah-pcs] Comment savannah SNF 2013-02-28 14:17:57: precursor status Message-ID: <13272072.114.1363990620567.JavaMail.coral@snc-coraldb.stanford.edu> outdated From mcalarrudo at rambus.com Wed Mar 27 10:57:34 2013 From: mcalarrudo at rambus.com (mcalarrudo at rambus.com) Date: Wed, 27 Mar 2013 10:57:34 -0700 (PDT) Subject: [savannah-pcs] Problem savannah SNF 2013-03-27 10:57:34: No Tatalum after two Depositions Message-ID: <23822211.14.1364407054304.JavaMail.coral@snc-coraldb.stanford.edu> If the bottle is empty how can I tell this because it was pulsing but no deposition. Sent 1st test wafer out for XPS which showed no tatalum deposited. Unable to measure because there is no recipe in wollems for tatalum. Ran a second test wafer same result. I need help to reolve this issue. From jhaydon at stanford.edu Sat Mar 30 06:40:11 2013 From: jhaydon at stanford.edu (jhaydon at stanford.edu) Date: Sat, 30 Mar 2013 06:40:11 -0700 (PDT) Subject: [savannah-pcs] Problem savannah SNF 2013-03-27 10:57:34: No Tatalum after two Depositions Message-ID: <24450551.44.1364650811415.JavaMail.coral@snc-coraldb.stanford.edu> No characterization has been done for this material From jprovine at stanford.edu Sat Mar 30 12:00:37 2013 From: jprovine at stanford.edu (J Provine) Date: Sat, 30 Mar 2013 12:00:37 -0700 Subject: [savannah-pcs] Problem savannah SNF 2013-03-27 10:57:34: No Tatalum after two Depositions In-Reply-To: <24450551.44.1364650811415.JavaMail.coral@snc-coraldb.stanford.edu> References: <24450551.44.1364650811415.JavaMail.coral@snc-coraldb.stanford.edu> Message-ID: dear savannah users and mary in particular, jim's answer is incorrect and does not address the issue raised. characterization work has been done for this precursor. furthermore, as everyone who has successfully passed the savannah training should remember one strong indication that a precursor is empty is that no pressure pulses can be detected when the precursor is pulsed by a recipe. that is not a guarantee that the precursor is empty, but it is an indication that something is wrong with the desired recipe. in what is likely related news, i found the Ta precursor without the heater jacket on the precursor cylinder, meaning it was still at room temp instead of 60C. the jacket heater was electrically on and at temperature, but it was not physically wrapped around the Ta precursor cylinder instead hanging loose in the cabinet of the savannah. this is not good either for anyone wanting to use the Ta precursor or anyone who would like to see the machine operated safely because an open heater like that could interfere with connecting electrical wires. finally, with the heater in place i pulsed the Ta precursor and saw that clear pressure pulses were visible in the savannah, indicating strongly that it is not empty. j On Sat, Mar 30, 2013 at 6:40 AM, wrote: > No characterization has been done for this material > _______________________________________________ > savannah-pcs mailing list > savannah-pcs at snf.stanford.edu > http://snf.stanford.edu/mailman/listinfo/savannah-pcs > -------------- next part -------------- An HTML attachment was scrubbed... URL: From mmrincon at stanford.edu Sat Mar 30 12:59:56 2013 From: mmrincon at stanford.edu (Michelle Rincon) Date: Sat, 30 Mar 2013 12:59:56 -0700 (PDT) Subject: [savannah-pcs] Problem savannah SNF 2013-03-27 10:57:34: No Tatalum after two Depositions In-Reply-To: Message-ID: <367323377.276761.1364673596108.JavaMail.root@stanford.edu> Hi J, The missing jacket on the Ta is from me- I was looking at it yesterday afternoon to verify the label on it and forgot to put it back on. Thank you for catching that and noting it! The Ta was pulsing during the runs where the films didn't deposit so Mary, Usha, and I are going to do additional recipe characterization work to understand why there was no film growth. The recipe that ran was our first shot at trying it on Savannah so some development is certainly needed. Thanks! Michelle ----- Original Message ----- From: "J Provine" To: "Jim Haydon" Cc: savannah-pcs at snf.stanford.edu Sent: Saturday, March 30, 2013 12:00:37 PM Subject: Re: [savannah-pcs] Problem savannah SNF 2013-03-27 10:57:34: No Tatalum after two Depositions dear savannah users and mary in particular, jim's answer is incorrect and does not address the issue raised. characterization work has been done for this precursor. furthermore, as everyone who has successfully passed the savannah training should remember one strong indication that a precursor is empty is that no pressure pulses can be detected when the precursor is pulsed by a recipe. that is not a guarantee that the precursor is empty, but it is an indication that something is wrong with the desired recipe. in what is likely related news, i found the Ta precursor without the heater jacket on the precursor cylinder, meaning it was still at room temp instead of 60C. the jacket heater was electrically on and at temperature, but it was not physically wrapped around the Ta precursor cylinder instead hanging loose in the cabinet of the savannah. this is not good either for anyone wanting to use the Ta precursor or anyone who would like to see the machine operated safely because an open heater like that could interfere with connecting electrical wires. finally, with the heater in place i pulsed the Ta precursor and saw that clear pressure pulses were visible in the savannah, indicating strongly that it is not empty. j On Sat, Mar 30, 2013 at 6:40 AM, < jhaydon at stanford.edu > wrote: No characterization has been done for this material _______________________________________________ savannah-pcs mailing list savannah-pcs at snf.stanford.edu http://snf.stanford.edu/mailman/listinfo/savannah-pcs _______________________________________________ savannah-pcs mailing list savannah-pcs at snf.stanford.edu http://snf.stanford.edu/mailman/listinfo/savannah-pcs From jhaydon at stanford.edu Sun Mar 31 06:47:52 2013 From: jhaydon at stanford.edu (Jim Haydon) Date: Sun, 31 Mar 2013 06:47:52 -0700 Subject: [savannah-pcs] Problem savannah SNF 2013-03-27 10:57:34: No Tatalum after two Depositions In-Reply-To: References: <24450551.44.1364650811415.JavaMail.coral@snc-coraldb.stanford.edu> Message-ID: <51583E88.8060000@stanford.edu> On 3/30/2013 12:00 PM, J Provine wrote: > dear savannah users and mary in particular, > jim's answer is incorrect and does not address the issue raised. > characterization work has been done for this precursor. > > furthermore, as everyone who has successfully passed the savannah > training should remember one strong indication that a precursor is > empty is that no pressure pulses can be detected when the precursor is > pulsed by a recipe. that is not a guarantee that the precursor is > empty, but it is an indication that something is wrong with the > desired recipe. > > in what is likely related news, i found the Ta precursor without the > heater jacket on the precursor cylinder, meaning it was still at room > temp instead of 60C. the jacket heater was electrically on and at > temperature, but it was not physically wrapped around the Ta precursor > cylinder instead hanging loose in the cabinet of the savannah. this > is not good either for anyone wanting to use the Ta precursor or > anyone who would like to see the machine operated safely because an > open heater like that could interfere with connecting electrical wires. > > finally, with the heater in place i pulsed the Ta precursor and saw > that clear pressure pulses were visible in the savannah, indicating > strongly that it is not empty. > > j > > > On Sat, Mar 30, 2013 at 6:40 AM, > wrote: > > No characterization has been done for this material > _______________________________________________ > savannah-pcs mailing list > savannah-pcs at snf.stanford.edu > http://snf.stanford.edu/mailman/listinfo/savannah-pcs > > Hi J When I talked to Michelle early Friday was given the impression that th Ta had not been characterized. I am sorry for the misinformation on my part. I may have misunderstood or miscomumicated with Michelle. I am glad that the Ta has been characterized that at least does answer one question. When I was watching the process with Mary there was a pulse that was about 1/3 to 1/5 the amplitude of the water pulse even though the pulse length was longer for the Ta. What should the amplitude of the pulse be for Ta?I did not notice at the time that the jacket was not secured on the bottle. I am doubtful that the loose jacket or even one not attached would pose any real risk unless the set point was set at a very high temperature and one would think that Cambridge Nano Tech. would of thought of that possibility and set the maximum allowable temp to be well with in those safety limits . The only safety problem I have seen is when the solid state relay shorts and can not be turned off. If the system was not designed to handle full voltage on a heater they should either have something that monitors the current when the relay has been told to turned off to verify that is off and if not perhaps shut the machine off or use heaters that do not have sufficient wattage to pose a risk. Jim -------------- next part -------------- An HTML attachment was scrubbed... URL: