From jprovine at stanford.edu Wed Aug 11 22:39:35 2010 From: jprovine at stanford.edu (J Provine) Date: Wed, 11 Aug 2010 22:39:35 -0700 Subject: savannah enable issue fixed Message-ID: hi all, the problem with enabling the savannah on coral has been fixed thanks to bill murray. please use this going forward as it will help folks monitor when the tool is in use. jim haydon will install an interlock on the monitor. bill is also working to add a dialogue box upon disabling. i'll use this to track qualification data. for standard user runs, the number of cycles run will need to be entered to disable. there is a box for entering the measured film thickness, which you can go back to fill in after you have had a chance to measured it. tracking the number of cycles accurately will help with monitoring precursor usage and hopefully prevent any downtime due to waiting on material delivery. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Wed Aug 18 13:41:32 2010 From: jprovine at stanford.edu (J Provine) Date: Wed, 18 Aug 2010 13:41:32 -0700 Subject: data collection upon logout Message-ID: hello everyone, starting tomorrow you should see a dialog upon logout of the savannah on coral. the box asks you to enter whether the run was a process qual or a user deposition. almost always you will be doing a user deposition, as a process qual is a specific run as outlined in the online documentation. you will also be required to enter what material you deposited and how many cycles you ran of that material. there are also non-mandatory box to enter the measured thickness in A of your film and the a comments field. a couple of brief points: - if you do multiple runs of the same materials (venting in between), please record the total number of cycles. - if you run multiple types of films in a single enable, identify one of the films, cycles, and thickness; but please outline what you did in all in the comments section - IMPORTANT: please only fill in the thickness if you measured it. don't put in guesses or desired thicknesses. - you can go back to your run in the history on coral and update the thickness after you have measured it so you don't need to wait to disable if you want. thanks for your help and i look forward to lots of high quality films and high up time with all of you. j -------------- next part -------------- An HTML attachment was scrubbed... URL: