savannah enable issue fixed
jprovine at stanford.edu
Wed Aug 11 22:39:35 PDT 2010
the problem with enabling the savannah on coral has been fixed thanks to
bill murray. please use this going forward as it will help folks monitor
when the tool is in use. jim haydon will install an interlock on the
monitor. bill is also working to add a dialogue box upon disabling. i'll
use this to track qualification data. for standard user runs, the number of
cycles run will need to be entered to disable. there is a box for entering
the measured film thickness, which you can go back to fill in after you have
had a chance to measured it. tracking the number of cycles accurately will
help with monitoring precursor usage and hopefully prevent any downtime due
to waiting on material delivery.
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