From jprovine at stanford.edu Fri Dec 3 09:32:34 2010 From: jprovine at stanford.edu (J Provine) Date: Fri, 3 Dec 2010 09:32:34 -0800 Subject: ammonia line functional on savannah ald - team nitride back on the case Message-ID: hello savannah users and ee412 profs. thanks to efforts by jim haydon and elmer the new ammonia line (currently sans O2 purifier) is installed, has passed leak check, and is available for processing. i ran a line clear and pulse check yesterday afternoon. everything is in fine working order. team nitride ran a film test last night, which just finished. results tbd. All savannah users, you no longer need to (or should) adjust the regulator for using the ammonia line. the bottle valve, regulator, and needle valve are all set to a good process point and the nitride recipes can simply be run without any hardware adjustments. if there are any questions, please let me know. happy processing. j ps. for those of you not in EE412, a tremendous amount of data collection and thought by the EE412 ald teams will be presented on wednesday december 8th at 4pm in allen 101x. their findings will soon be on the wiki, but the presentations will be an excellent venue for learning about their efforts this quarter. -------------- next part -------------- An HTML attachment was scrubbed... URL: From yihsuan at stanford.edu Sun Dec 5 15:28:19 2010 From: yihsuan at stanford.edu (Yi-Hsuan Lin) Date: Sun, 5 Dec 2010 15:28:19 -0800 (PST) Subject: savvanah released from 15:30 to 19:30 today Message-ID: <778015282.489006.1291591699653.JavaMail.root@zm04.stanford.edu> Hi all, Sorry for late notification. The deposition was done earlier than expected. Regards, Yi-Hsuan From jprovine at stanford.edu Thu Dec 9 17:39:03 2010 From: jprovine at stanford.edu (J Provine) Date: Thu, 9 Dec 2010 17:39:03 -0800 Subject: savannah ald online Message-ID: hi everyone, the savannah is back and functional. the 100 cycle al2o3 test (102A) looks great. i swapped out the Zr precursor for the silanol. the standby recipe was reset for the new precursor, and the configuration file updated. please let me know of any problems. j -------------- next part -------------- An HTML attachment was scrubbed... URL: