ammonia line functional on savannah ald - team nitride back on the case
jprovine at stanford.edu
Fri Dec 3 09:32:34 PST 2010
hello savannah users and ee412 profs.
thanks to efforts by jim haydon and elmer the new ammonia line (currently
sans O2 purifier) is installed, has passed leak check, and is available for
i ran a line clear and pulse check yesterday afternoon. everything is in
fine working order. team nitride ran a film test last night, which just
finished. results tbd.
All savannah users, you no longer need to (or should) adjust the regulator
for using the ammonia line. the bottle valve, regulator, and needle valve
are all set to a good process point and the nitride recipes can simply be
run without any hardware adjustments.
if there are any questions, please let me know.
ps. for those of you not in EE412, a tremendous amount of data collection
and thought by the EE412 ald teams will be presented on wednesday december
8th at 4pm in allen 101x. their findings will soon be on the wiki, but the
presentations will be an excellent venue for learning about their efforts
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