From wslee at stanford.edu Mon Nov 1 11:45:37 2010 From: wslee at stanford.edu (Scott Lee) Date: Mon, 1 Nov 2010 11:45:37 -0700 Subject: Savannah released till 3pm... Sorry for the late notice... Message-ID: Planning mixup. Scott -------------- next part -------------- An HTML attachment was scrubbed... URL: From simonyu at stanford.edu Mon Nov 1 13:00:39 2010 From: simonyu at stanford.edu (Shimeng Yu) Date: Mon, 1 Nov 2010 13:00:39 -0700 Subject: savannah free till 6pm Message-ID: <201011011300372590922@stanford.edu> 2010-11-01 Shimeng Yu (???) Nanoelectronics Group Department of Electrical Engineering, Stanford University Homepage: http://www.stanford.edu/~simonyu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From simonyu at stanford.edu Mon Nov 1 22:15:40 2010 From: simonyu at stanford.edu (Shimeng Yu) Date: Mon, 1 Nov 2010 21:15:40 -0800 Subject: savannah free from 10pm Message-ID: <201011012115389639812@stanford.edu> finished ealier 2010-11-01 Shimeng Yu (???) Nanoelectronics Group Department of Electrical Engineering, Stanford University Homepage: http://www.stanford.edu/~simonyu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From cfchiang at stanford.edu Mon Nov 1 21:56:17 2010 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Mon, 1 Nov 2010 21:56:17 -0700 (PDT) Subject: savannah reservation released Nov. 3, 12-8am In-Reply-To: <201011012115389639812@stanford.edu> Message-ID: <1796534929.253715.1288673777950.JavaMail.root@zm06.stanford.edu> took an earlier slot From jennyhu at stanford.edu Tue Nov 2 19:42:46 2010 From: jennyhu at stanford.edu (Jenny Hu) Date: Tue, 2 Nov 2010 19:42:46 -0700 (PDT) Subject: Savannah Free 8-10 PM Message-ID: <470553727.284693.1288752166710.JavaMail.root@zm06.stanford.edu> I'm sorry for the late notice, but I'm unable to use it. Best, Jenny From alvin.barlian at halcyonmolecular.com Tue Nov 2 19:53:40 2010 From: alvin.barlian at halcyonmolecular.com (Alvin Barlian) Date: Tue, 2 Nov 2010 19:53:40 -0700 Subject: reservation released for Wed 8am-noon (unlike Jenny, I'm giving a 12-hour advanced notice) Message-ID: =) -------------- next part -------------- An HTML attachment was scrubbed... URL: From alsune at stanford.edu Tue Nov 2 23:06:21 2010 From: alsune at stanford.edu (Wooshik Jung) Date: Tue, 2 Nov 2010 23:06:21 -0700 (PDT) Subject: Reservation released 12AM-4AM, 3rd Nov Message-ID: <2145918320.14573.1288764381187.JavaMail.root@zm03.stanford.edu> Encountered problems in Sample preparation. Sorry for the short notice. Wooshik From zeyuan at stanford.edu Wed Nov 3 10:10:37 2010 From: zeyuan at stanford.edu (Ze Yuan) Date: Wed, 3 Nov 2010 10:10:37 -0700 (PDT) Subject: Reservation released now till 12:00pm In-Reply-To: <2145918320.14573.1288764381187.JavaMail.root@zm03.stanford.edu> Message-ID: <1326338554.25013.1288804237395.JavaMail.root@zm03.stanford.edu> Sorry for the very late notice. Original plan got delayed. Won't have enough time to prepare sample in such short time. From alvin.barlian at halcyonmolecular.com Thu Nov 4 00:08:40 2010 From: alvin.barlian at halcyonmolecular.com (Alvin Barlian) Date: Thu, 4 Nov 2010 00:08:40 -0700 Subject: reservation removed for Thursday 8-11am Message-ID: <5012290D-8F2A-4A4B-ABC7-0FB576541BB0@halcyonmolecular.com> From pradeep.nataraj at gmail.com Thu Nov 4 08:15:45 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Thu, 4 Nov 2010 08:15:45 -0700 Subject: removed reservation today 11/4 noon.sorry my samples are not ready Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Fri Nov 5 02:39:43 2010 From: jprovine at stanford.edu (J Provine) Date: Fri, 5 Nov 2010 02:39:43 -0700 Subject: precursor swap (W for Zr) Message-ID: hi all, based on needs for EE412, i swapped out the Bis (tert-butylimino) bis(dimethylamino)tungsten precursor for the tetrakis(ethylmethylamido)zirconium precursor. please be aware. if you want the W precursor back on for a test at any time, just let me know. thanks, j -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Sat Nov 6 11:59:13 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Sat, 6 Nov 2010 11:59:13 -0700 Subject: ALD status Message-ID: J, I came in this morning the ALD Labview program was shutdown. I reloaded the program and started with standby program first. All the heaters are coming back up now. I was going to run Al2O3 and HFOx after everything comes back up. Am I missing anything? Please let me know. Pradeep -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Sat Nov 6 12:12:16 2010 From: jprovine at stanford.edu (J Provine) Date: Sat, 6 Nov 2010 12:12:16 -0700 Subject: ALD status In-Reply-To: References: Message-ID: pradeep, if the program restarts fine and the heaters come up you should be fine. i would recommend doing dozen or so cycles of al2o3 on an empty chamber to check the pulses. how cold did the manifold and exhaust lines get? was the program closed or just not running? j On Sat, Nov 6, 2010 at 11:59 AM, Pradeep Nataraj wrote: > J, > I came in this morning the ALD Labview program was shutdown. > I reloaded the program and started with standby program first. > All the heaters are coming back up now. > I was going to run Al2O3 and HFOx after everything comes back up. > > Am I missing anything? Please let me know. > > Pradeep > -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Sat Nov 6 13:07:26 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Sat, 6 Nov 2010 13:07:26 -0700 Subject: ALD status In-Reply-To: References: Message-ID: J, Every thing looks okay now. I did not get chance to cycles of Al2O3, I left a comment for next user. Pradeep On Sat, Nov 6, 2010 at 12:12 PM, J Provine wrote: > pradeep, > if the program restarts fine and the heaters come up you should be fine. i > would recommend doing dozen or so cycles of al2o3 on an empty chamber to > check the pulses. how cold did the manifold and exhaust lines get? > was the program closed or just not running? > > j > > > On Sat, Nov 6, 2010 at 11:59 AM, Pradeep Nataraj < > pradeep.nataraj at gmail.com> wrote: > >> J, >> I came in this morning the ALD Labview program was shutdown. >> I reloaded the program and started with standby program first. >> All the heaters are coming back up now. >> I was going to run Al2O3 and HFOx after everything comes back up. >> >> Am I missing anything? Please let me know. >> >> Pradeep >> > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Sat Nov 6 13:08:54 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Sat, 6 Nov 2010 13:08:54 -0700 Subject: ALD res removed 11/6 till 6:00PM Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From yoneoka at stanford.edu Sat Nov 6 13:42:15 2010 From: yoneoka at stanford.edu (Shingo Yoneoka) Date: Sat, 6 Nov 2010 13:42:15 -0700 (PDT) Subject: ALD status In-Reply-To: Message-ID: <175121008.1271476.1289076135230.JavaMail.root@zm08.stanford.edu> Hi, Pradeep and J. When I finished my session, I misunderstood and log-off the computer after running standby program. That may shutdown the ALD Labview program. I'm really sorry for the trouble. I will be careful next time. Thanks, Shingo ----- Original Message ----- From: "Pradeep Nataraj" To: "J Provine" Cc: savannah at snf.stanford.edu Sent: Saturday, November 6, 2010 1:07:26 PM Subject: Re: ALD status J, Every thing looks okay now. I did not get chance to cycles of Al2O3, I left a comment for next user. Pradeep On Sat, Nov 6, 2010 at 12:12 PM, J Provine < jprovine at stanford.edu > wrote: pradeep, if the program restarts fine and the heaters come up you should be fine. i would recommend doing dozen or so cycles of al2o3 on an empty chamber to check the pulses. how cold did the manifold and exhaust lines get? was the program closed or just not running? j On Sat, Nov 6, 2010 at 11:59 AM, Pradeep Nataraj < pradeep.nataraj at gmail.com > wrote: J, I came in this morning the ALD Labview program was shutdown. I reloaded the program and started with standby program first. All the heaters are coming back up now. I was going to run Al2O3 and HFOx after everything comes back up. Am I missing anything? Please let me know. Pradeep From jprovine at stanford.edu Sat Nov 6 15:16:58 2010 From: jprovine at stanford.edu (J Provine) Date: Sat, 6 Nov 2010 15:16:58 -0700 Subject: NH3 source bottle closed Message-ID: I have closed the NH3 source bottle for an experiment with the EE412 team nitride group. this means NH3 for nitride films is not currently available. it will remain closed until i post a comment on coral and through the email list saying it has been reopened. to my knowledge only the EE412 group is trying to run nitrides currently so this should not be a problem...but if you want to run with NH3, please let me know and i'll make sure to get the source opened up again and set up for you. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From simonyu at stanford.edu Sun Nov 7 00:52:01 2010 From: simonyu at stanford.edu (Shimeng Yu) Date: Sat, 6 Nov 2010 23:52:01 -0800 Subject: savannah free Sun afternoon Message-ID: <201011062351563294791@stanford.edu> no more prepared substrates... 2010-11-06 Shimeng Yu (???) Nanoelectronics Group Department of Electrical Engineering, Stanford University Homepage: http://www.stanford.edu/~simonyu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From zeyuan at stanford.edu Wed Nov 10 01:01:23 2010 From: zeyuan at stanford.edu (Ze Yuan) Date: Wed, 10 Nov 2010 01:01:23 -0800 Subject: Savannah released Wednesday 11:30 to 13:30 Message-ID: Did more than enough tonight. Won't need it tomorrow. Hope someone could use it in such a short notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From yihsuan at stanford.edu Wed Nov 10 17:46:55 2010 From: yihsuan at stanford.edu (Yi-Hsuan Lin) Date: Wed, 10 Nov 2010 17:46:55 -0800 (PST) Subject: savvanah released fromThursday 21:30 to Friday 6:30, and Sunday 17:30- 23:30 In-Reply-To: <477669773.675917.1289439616722.JavaMail.root@zm04.stanford.edu> Message-ID: <1668347011.676083.1289440015767.JavaMail.root@zm04.stanford.edu> No prepared substrates tomorrow. Won't use savvanah from Thursday 21:30 to Friday 6:30. Also released the reservation time on Sunday 17:30 to 23:30. Yi-Hsuan From zeyuan at stanford.edu Sun Nov 14 22:07:52 2010 From: zeyuan at stanford.edu (Ze Yuan) Date: Sun, 14 Nov 2010 22:07:52 -0800 Subject: Savannah released Monday 11:00am to 13:30pm Message-ID: Just scheduled a teleconference. Unable to use the time. -------------- next part -------------- An HTML attachment was scrubbed... URL: From cechang at stanford.edu Tue Nov 16 13:58:39 2010 From: cechang at stanford.edu (Chu-En Chang) Date: Tue, 16 Nov 2010 13:58:39 -0800 Subject: Savannah free tomorrow 0AM-10AM sorry for the late notice EOM Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From yihsuan at stanford.edu Thu Nov 18 12:30:11 2010 From: yihsuan at stanford.edu (Yi-Hsuan Lin) Date: Thu, 18 Nov 2010 12:30:11 -0800 (PST) Subject: savvanah released from Friday 0:00 to 8:00 am In-Reply-To: <1206506345.1022375.1290112168637.JavaMail.root@zm04.stanford.edu> Message-ID: <558608287.1022392.1290112211880.JavaMail.root@zm04.stanford.edu> Hi all, As title, savvanah released from Friday 0:00 to 8:00 am. Regards, Yi-Hsuan From daesung at stanford.edu Fri Nov 19 10:11:37 2010 From: daesung at stanford.edu (Daesung Lee) Date: Fri, 19 Nov 2010 10:11:37 -0800 (PST) Subject: Savannah free till 3pm In-Reply-To: <558608287.1022392.1290112211880.JavaMail.root@zm04.stanford.edu> Message-ID: <951091506.711697.1290190297908.JavaMail.root@zm09.stanford.edu> Hi all, Due to the equipment shutdown in the previous step of the process, the wafers won't be ready. Sorry about that. Regards, Daesung From yoneoka at stanford.edu Mon Nov 22 17:43:30 2010 From: yoneoka at stanford.edu (Shingo Yoneoka) Date: Mon, 22 Nov 2010 17:43:30 -0800 (PST) Subject: Reservation released: tomorrow 8am-12pm Message-ID: <457577266.293129.1290476610299.JavaMail.root@zm08.stanford.edu> Hi, all. I released the reservation for tomorrow 8am-12pm since NH3 line has not installed yet. Thanks, Shingo From yihsuan at stanford.edu Wed Nov 24 10:56:23 2010 From: yihsuan at stanford.edu (Yi-Hsuan Lin) Date: Wed, 24 Nov 2010 10:56:23 -0800 (PST) Subject: savvanah released from Thursday 0 am to 9:30 am In-Reply-To: <1649657931.142902.1290624771169.JavaMail.root@zm04.stanford.edu> Message-ID: <1497551509.143152.1290624983477.JavaMail.root@zm04.stanford.edu> Hi all, Will not use savvanah from Thursday 0 am to 9:30 am. Regards, Yi-Hsuan From jprovine at stanford.edu Mon Nov 29 13:52:03 2010 From: jprovine at stanford.edu (J Provine) Date: Mon, 29 Nov 2010 13:52:03 -0800 Subject: Problem savannah SNF 2010-11-28 18:16:53: Chamber is flaking heavily In-Reply-To: <20101129021654.60845413A@smtp-unencrypted.stanford.edu> References: <20101129021654.60845413A@smtp-unencrypted.stanford.edu> Message-ID: i vacuumed the chamber and gave it a thorough wipe down to reduce (and hopefully for the meantime) eliminate the flakes. the chamber will be bead blasted to remove film build up over the christmas holidays. to clean the system you can always wipe it down with clean-wipes (be careful it is hot), or vacuum it the same way you would with innotec (clean wipes covering the nozzle of the house vacuum). j On Sun, Nov 28, 2010 at 6:16 PM, wrote: > I'm not sure how to clean it, but the chamber was flaking very heavily > before my run. I'm worried that these particles may be falling onto samples. > > -------------- next part -------------- An HTML attachment was scrubbed... URL: