precursor swap (W for Zr)
jprovine at stanford.edu
Fri Nov 5 02:39:43 PDT 2010
based on needs for EE412, i swapped out the Bis (tert-butylimino)
bis(dimethylamino)tungsten precursor for the
tetrakis(ethylmethylamido)zirconium precursor. please be aware. if you
want the W precursor back on for a test at any time, just let me know.
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