precursor swap (W for Zr)

J Provine jprovine at stanford.edu
Fri Nov 5 02:39:43 PDT 2010


hi all,
based on needs for EE412, i swapped out the  Bis (tert-butylimino)
bis(dimethylamino)tungsten precursor for the
tetrakis(ethylmethylamido)zirconium precursor.  please be aware.  if you
want the W precursor back on for a test at any time, just let me know.

thanks,
j
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