ALD status

J Provine jprovine at stanford.edu
Sat Nov 6 12:12:16 PDT 2010


pradeep,
if the program restarts fine and the heaters come up you should be fine.  i
would recommend doing dozen or so cycles of al2o3 on an empty chamber to
check the pulses.  how cold did the manifold and exhaust lines get?
was the program closed or just not running?

j

On Sat, Nov 6, 2010 at 11:59 AM, Pradeep Nataraj
<pradeep.nataraj at gmail.com>wrote:

> J,
> I came in this morning the ALD Labview program was shutdown.
> I reloaded the program and started with standby program first.
> All the heaters are coming back up now.
> I was going to run Al2O3 and HFOx after everything comes back up.
>
> Am I missing anything?  Please let me know.
>
> Pradeep
>
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