ALD status

Pradeep Nataraj pradeep.nataraj at gmail.com
Sat Nov 6 13:07:26 PDT 2010


J,
Every thing looks okay now.
I did not get chance to cycles of Al2O3, I left a comment for next user.
Pradeep

On Sat, Nov 6, 2010 at 12:12 PM, J Provine <jprovine at stanford.edu> wrote:

> pradeep,
> if the program restarts fine and the heaters come up you should be fine.  i
> would recommend doing dozen or so cycles of al2o3 on an empty chamber to
> check the pulses.  how cold did the manifold and exhaust lines get?
> was the program closed or just not running?
>
> j
>
>
> On Sat, Nov 6, 2010 at 11:59 AM, Pradeep Nataraj <
> pradeep.nataraj at gmail.com> wrote:
>
>> J,
>> I came in this morning the ALD Labview program was shutdown.
>> I reloaded the program and started with standby program first.
>> All the heaters are coming back up now.
>> I was going to run Al2O3 and HFOx after everything comes back up.
>>
>> Am I missing anything?  Please let me know.
>>
>> Pradeep
>>
>
>
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