From ywu1999 at stanford.edu Tue Oct 5 19:33:36 2010 From: ywu1999 at stanford.edu (Yi Wu) Date: Tue, 5 Oct 2010 19:33:36 -0700 (PDT) Subject: Savannah released from 8pm-10pm Message-ID: <1530163821.235895.1286332416815.JavaMail.root@zm09.stanford.edu> Sorry that our group deposition switches to tmr training session. Sorry for the late notice. Best Wishes, -------------------- Yi Wu Electrical Engineering Stanford University Cell Phone: 650-387-0778 E-Mail: ywu1999 at stanford.edu From jprovine at stanford.edu Mon Oct 11 14:46:34 2010 From: jprovine at stanford.edu (J Provine) Date: Mon, 11 Oct 2010 14:46:34 -0700 Subject: reservations have filled up Message-ID: hi everyone, as has been anticipated somewhat the savannah system is now reserved basically around the clock. while i'm delighted to see it getting such thorough usage i want to make sure it is being used efficiently and everyone is getting a chance to run their experiments. i'm planning on working with bill murray to introduce some reservation limits on the system, and i want your input on what would be best. currently, i'm thinking of the following restrictions: 1) max reservation length of 4hours during 8am-5pm (aka "business hours") 2) total reservation amount of 12hours without prior approval. what are your thoughts and suggestions about these restrictions or any others? no changes will be made this week, but something will be in place by next week. this is something that may be rescinded/changed after EE412, which is contributing heavily to the usage, but hopefully the system will still be getting such high usage. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Wed Oct 13 10:48:33 2010 From: jprovine at stanford.edu (J Provine) Date: Wed, 13 Oct 2010 10:48:33 -0700 Subject: pressure update Message-ID: hi everyone, if you recall from a previous email there are two most likely issues with our continually increasing base pressure: 1) the pump (an oil based pump) is due for cleaning/check-up/refill and/or 2) the pressure gauge needs to be recalibrated after all the deposition that has gotten on it in handling 1, the oil pump is out currently, and a temporary dry scroll pump has replaced it. the base pressure is at 160mTorr at 5sccm, which may be the limit of the pump. please be diligent in watching the base pressure and its consistency. i'm calibrating a new gauge and will compare that to the old gauge to see if 2 was a contributing factor. i was unable to replicate the spurious pressure readings that both scott and jason saw yesterday (10/12/2010), but that also points to pressure gauge issues i think. please let me know if you see anything like this going forward... jason, as you are monitoring titania deposition, can you send data about titania dep rate vs base pressure (or date), please? j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Thu Oct 14 16:40:58 2010 From: jprovine at stanford.edu (J Provine) Date: Thu, 14 Oct 2010 16:40:58 -0700 Subject: pressure gauge replacement Message-ID: hi everyone, apologies, but i have been booked solid since yesterday afternoon when i discovered the gauge pressure issue. i have a couple of thing to finish immediately for the fiji permit that has to be done tonight and then i'll install the new pressure gauge. if you have a friday reservation, please check the tool status to see how things are progressing. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Fri Oct 15 17:58:02 2010 From: jprovine at stanford.edu (J Provine) Date: Fri, 15 Oct 2010 17:58:02 -0700 Subject: machine is green...running test recipe currently. Message-ID: hi savannah users, pressure gauge replaced and all looks good so far. base pressure of ~50mTorr at 5sccm with the dry pump. i'm running a test deposition currently. and it should be done in a couple of hours. if it comes out good, i'll release the system to everyone. please monitor and call me if you need anything for weekend runs. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Fri Oct 15 22:01:51 2010 From: jprovine at stanford.edu (J Provine) Date: Fri, 15 Oct 2010 22:01:51 -0700 Subject: Savannah is up and hood to go. Message-ID: From cgorin at stanford.edu Mon Oct 18 10:34:14 2010 From: cgorin at stanford.edu (Craig Gorin) Date: Mon, 18 Oct 2010 10:34:14 -0700 Subject: Test Alumina Wafers In-Reply-To: References: Message-ID: Hi, I was wondering if anyone had test silicon wafers they had deposited with alumina lying around that they don't want. I'd be happy to take them off your hands/trade clean silicon wafers for them. Any thicknesses 2-10 nm will be helpful for the experiments I want to run, but we've been going through quite a lot for me to make them all myself. Thanks! Craig Gorin -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Mon Oct 18 17:08:32 2010 From: jprovine at stanford.edu (J Provine) Date: Mon, 18 Oct 2010 17:08:32 -0700 Subject: rules for savannah reservation Message-ID: hi everyone, i'm working with john shott to get the following rules established on coral for the savannah system. it is be ideal if everyone could self police to obey them going forward even if they haven't been turned on yet. 1. longest possible reservation is 12 hours 2. only 2 reservations per week per user 3. max reservation length of 4 hours between 8am and 5pm (aka business hours). this may help clear up some congestion. if you need a reservation longer than 12 hours, please let me know and we can work something out. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Tue Oct 19 11:21:54 2010 From: jprovine at stanford.edu (J Provine) Date: Tue, 19 Oct 2010 11:21:54 -0700 Subject: reservations Message-ID: hi everyone, 1) thanks to john shott we have the reservation policies announced in place. please provide me with feedback. 2) despite the machine being booked solid, it is not being used full time (check large open times on sunday and monday and today). if you are cancelling reservations, please email the list so that the system won't sit idle when there are users that want to get some time. some things i consider as good etiquette: 1) delete your reservation as soon as you know you cannot use it 2) if you are deleting your reservation less than 24 hours before it was scheduled to begin - email the list announcing the time to be free. 3) show up for your reservation on time...if you know you will be late please let the list know by email. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From wslee at stanford.edu Wed Oct 20 16:08:20 2010 From: wslee at stanford.edu (Scott Lee) Date: Wed, 20 Oct 2010 16:08:20 -0700 Subject: Savannah Free from 6pm-12am tonight Message-ID: Unable to use it tonight. Sorry for the last minute notice. Scott -------------- next part -------------- An HTML attachment was scrubbed... URL: From shuangli at stanford.edu Wed Oct 20 16:14:25 2010 From: shuangli at stanford.edu (Shuang Li) Date: Wed, 20 Oct 2010 16:14:25 -0700 Subject: Savannah Free from 6pm-12am tonight In-Reply-To: References: Message-ID: Taken from 7:00pm. Thanks On Wed, Oct 20, 2010 at 4:08 PM, Scott Lee wrote: > Unable to use it tonight. ?Sorry for the last minute notice. > Scott From ywu1999 at stanford.edu Wed Oct 20 21:29:28 2010 From: ywu1999 at stanford.edu (Yi Wu) Date: Wed, 20 Oct 2010 21:29:28 -0700 (PDT) Subject: Savannah released from 9:30pm-12am Message-ID: <1059313062.466418.1287635368918.JavaMail.root@zm09.stanford.edu> Finished early. Please go ahead and use it even though it's under the reservation name 'Shuangli' Best Wishes, -------------------- Yi Wu Electrical Engineering Stanford University Cell Phone: 650-387-0778 E-Mail: ywu1999 at stanford.edu From zeyuan at stanford.edu Wed Oct 20 22:18:05 2010 From: zeyuan at stanford.edu (Ze Yuan) Date: Wed, 20 Oct 2010 22:18:05 -0700 Subject: Taken Savannah from 9:30pm-2:30am Message-ID: Taken, and Junam 's time is also taken by me. So Savannah is free from 2:30am tomorrow On Wed, Oct 20, 2010 at 9:29 PM, Yi Wu wrote: > Finished early. Please go ahead and use it even though it's under the > reservation name 'Shuangli' > > Best Wishes, > -------------------- > Yi Wu > Electrical Engineering > Stanford University > Cell Phone: 650-387-0778 > E-Mail: ywu1999 at stanford.edu > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Thu Oct 21 08:28:19 2010 From: jprovine at stanford.edu (J Provine) Date: Thu, 21 Oct 2010 08:28:19 -0700 Subject: savannah free until 11am Message-ID: done early. enjoy. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From simonyu at stanford.edu Thu Oct 21 15:06:08 2010 From: simonyu at stanford.edu (Shimeng Yu) Date: Thu, 21 Oct 2010 15:06:08 -0700 Subject: savannah free 1:30pm Fri Message-ID: <201010211506062599821@stanford.edu> 2010-10-21 Shimeng Yu (???) Nanoelectronics Group Department of Electrical Engineering, Stanford University Homepage: http://www.stanford.edu/~simonyu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Sat Oct 23 02:26:09 2010 From: jasonlin at stanford.edu (J. Jason Lin) Date: Sat, 23 Oct 2010 02:26:09 -0700 Subject: savannah released Sunday 5:30pm - Monday 2am Message-ID: From simonyu at stanford.edu Sun Oct 24 13:00:06 2010 From: simonyu at stanford.edu (Shimeng Yu) Date: Sun, 24 Oct 2010 13:00:06 -0700 Subject: savannah free 5:30pm Message-ID: <201010241300058056045@stanford.edu> sorry for the late notice 2010-10-24 Shimeng Yu (???) Nanoelectronics Group Department of Electrical Engineering, Stanford University Homepage: http://www.stanford.edu/~simonyu/ -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Tue Oct 26 08:07:46 2010 From: jprovine at stanford.edu (J Provine) Date: Tue, 26 Oct 2010 08:07:46 -0700 Subject: savannah free 9-11am tuesday Message-ID: sorry for late notice, but trainee unable to attend. ze remember you have my reservation from 11am-1pm today. if you are not going to be able to use it let the list know so someone else can get in there. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Tue Oct 26 18:40:13 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Tue, 26 Oct 2010 18:40:13 -0700 Subject: removed res tonight..I am sick 10/27 Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From alvin.barlian at halcyonmolecular.com Wed Oct 27 14:53:10 2010 From: alvin.barlian at halcyonmolecular.com (Alvin Barlian) Date: Wed, 27 Oct 2010 14:53:10 -0700 Subject: test wafers Message-ID: <8B171FD2-49B4-4E3B-8F01-6C92F379A3ED@halcyonmolecular.com> Hi Savannah users, I'm wondering if you have test wafers that you don't need anymore with any film deposited using savannah. If you do, would you mind if I have them for a quick test? The thickness of the film doesn't matter. Thank you much in advance. Cheers, Alvin From jennyhu at stanford.edu Wed Oct 27 15:48:15 2010 From: jennyhu at stanford.edu (Jenny Hu) Date: Wed, 27 Oct 2010 15:48:15 -0700 (PDT) Subject: test wafers In-Reply-To: <8B171FD2-49B4-4E3B-8F01-6C92F379A3ED@halcyonmolecular.com> Message-ID: <1482737375.119611.1288219695758.JavaMail.root@zm06.stanford.edu> omg stop trying to steal people's samples...... heyyy forgot..what did you text me for the other day? ----- Original Message ----- From: "Alvin Barlian" To: savannah at snf.stanford.edu Sent: Wednesday, October 27, 2010 2:53:10 PM Subject: test wafers Hi Savannah users, I'm wondering if you have test wafers that you don't need anymore with any film deposited using savannah. If you do, would you mind if I have them for a quick test? The thickness of the film doesn't matter. Thank you much in advance. Cheers, Alvin From pradeep.nataraj at gmail.com Thu Oct 28 08:30:00 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Thu, 28 Oct 2010 08:30:00 -0700 Subject: Removed bunch of Reservation Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Fri Oct 29 15:27:02 2010 From: jprovine at stanford.edu (J Provine) Date: Fri, 29 Oct 2010 15:27:02 -0700 Subject: savannah free from now until 8pm Message-ID: releasing my current reservation...i cannot delete it because i'm in berkeley and don't have access to remote coral. but it is free until the next reservation. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Fri Oct 29 20:04:10 2010 From: jasonlin at stanford.edu (J. Jason Lin) Date: Fri, 29 Oct 2010 20:04:10 -0700 Subject: Savannah - No water precursor Message-ID: Dear Savannah users, I was running the TiO2 recipe and noticed that there was no increase in pressure associated with the H2O pulse--an indication that the water precursor may be empty. Ellipsometry measurements confirmed there was no deposition. Until J can take a look at the system, you may want to hold off using savannah if your recipe also uses H2O. Best, Jason From pradeep.nataraj at gmail.com Sat Oct 30 00:48:01 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Sat, 30 Oct 2010 00:48:01 -0700 Subject: Savannah - No water precursor In-Reply-To: References: Message-ID: J, I have important slot tomorrow morning, do you think we replace the H20? Thanks. Pradeep On Fri, Oct 29, 2010 at 8:04 PM, J. Jason Lin wrote: > Dear Savannah users, > > I was running the TiO2 recipe and noticed that there was no increase > in pressure associated with the H2O pulse--an indication that the > water precursor may be empty. Ellipsometry measurements confirmed > there was no deposition. > > Until J can take a look at the system, you may want to hold off using > savannah if your recipe also uses H2O. > > Best, > Jason > -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Sat Oct 30 06:39:04 2010 From: jprovine at stanford.edu (J Provine) Date: Sat, 30 Oct 2010 06:39:04 -0700 Subject: water cylinder replaced Message-ID: i replaced the water cylinder this morning...it was empty as jason noted.* running a pulse train, i got good quality pulses from the water line (see attached image). when i changed the water cylinder i found its heater jacket removed. this does not hurt the system and since we don't really heat the water, it is no trouble, but no one should be working inside the savannah cabinet on any heater jackets or connections (except the ammonia regulator) without me present. happy processing everyone. j * i know you all remember this from the written quiz...now here it is in action. -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: water pulse train.jpg Type: image/jpeg Size: 1296661 bytes Desc: not available URL: From pradeep.nataraj at gmail.com Sat Oct 30 08:48:12 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Sat, 30 Oct 2010 08:48:12 -0700 Subject: Savannah - No water precursor In-Reply-To: References: Message-ID: J, I have important slot tomorrow morning, do you think we replace the H20? Thanks. Pradeep On Fri, Oct 29, 2010 at 8:04 PM, J. Jason Lin wrote: > Dear Savannah users, > > I was running the TiO2 recipe and noticed that there was no increase > in pressure associated with the H2O pulse--an indication that the > water precursor may be empty. Ellipsometry measurements confirmed > there was no deposition. > > Until J can take a look at the system, you may want to hold off using > savannah if your recipe also uses H2O. > > Best, > Jason > -------------- next part -------------- An HTML attachment was scrubbed... URL: From pradeep.nataraj at gmail.com Sun Oct 31 13:37:57 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Sun, 31 Oct 2010 13:37:57 -0700 Subject: Reservation swap Message-ID: Dear ALD users, I am unable to make it today. Does anyone want to trade my ALD time today 10/31 starting 3:00PM to 10:00PM, I need 3.5 hrs in next day or so. Thanks for your support. Pnataraj -------------- next part -------------- An HTML attachment was scrubbed... URL: From cechang at stanford.edu Sun Oct 31 21:58:33 2010 From: cechang at stanford.edu (Chu-En Chang) Date: Sun, 31 Oct 2010 21:58:33 -0700 Subject: Savannah free Mon. morning 2AM-11AM sorry for the late notice. eom Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: