machine is green...running test recipe currently.
jprovine at stanford.edu
Fri Oct 15 17:58:02 PDT 2010
hi savannah users,
pressure gauge replaced and all looks good so far. base pressure of
~50mTorr at 5sccm with the dry pump.
i'm running a test deposition currently. and it should be done in a couple
of hours. if it comes out good, i'll release the system to everyone.
please monitor and call me if you need anything for weekend runs.
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