Savannah - No water precursor
J. Jason Lin
jasonlin at stanford.edu
Fri Oct 29 20:04:10 PDT 2010
Dear Savannah users,
I was running the TiO2 recipe and noticed that there was no increase
in pressure associated with the H2O pulse--an indication that the
water precursor may be empty. Ellipsometry measurements confirmed
there was no deposition.
Until J can take a look at the system, you may want to hold off using
savannah if your recipe also uses H2O.
More information about the savannah