Savannah - No water precursor

J. Jason Lin jasonlin at stanford.edu
Fri Oct 29 20:04:10 PDT 2010


Dear Savannah users,

I was running the TiO2 recipe and noticed that there was no increase
in pressure associated with the H2O pulse--an indication that the
water precursor may be empty.  Ellipsometry measurements confirmed
there was no deposition.

Until J can take a look at the system, you may want to hold off using
savannah if your recipe also uses H2O.

Best,
Jason



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