Savannah - No water precursor

Pradeep Nataraj pradeep.nataraj at gmail.com
Sat Oct 30 08:48:12 PDT 2010


J,
I have important slot tomorrow morning, do you think we replace the H20?
Thanks.
Pradeep

On Fri, Oct 29, 2010 at 8:04 PM, J. Jason Lin <jasonlin at stanford.edu> wrote:

> Dear Savannah users,
>
> I was running the TiO2 recipe and noticed that there was no increase
> in pressure associated with the H2O pulse--an indication that the
> water precursor may be empty.  Ellipsometry measurements confirmed
> there was no deposition.
>
> Until J can take a look at the system, you may want to hold off using
> savannah if your recipe also uses H2O.
>
> Best,
> Jason
>
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