From alexneu at stanford.edu Tue Sep 7 12:33:05 2010 From: alexneu at stanford.edu (Alex Neuhausen) Date: Tue, 7 Sep 2010 12:33:05 -0700 Subject: Test TiN Deposition, shadowing Message-ID: Hello Savannah community, Are there any users who do a TiN process who would be willing running a blank wafer for me during their next deposition and let me shadow them? I don't care what thickness you deposit. I'd like to test TiN as a temperature resistant adhesion layer for gold. Thank you, Alex -- Alex Neuhausen PhD Candidate Electrical Engineering Goldhaber-Gordon Lab 476 Lomita Mall Stanford, CA 94305 Office: 650-725-2047 Cell: 650-776-5672 -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Thu Sep 9 15:52:37 2010 From: jprovine at stanford.edu (J Provine) Date: Thu, 9 Sep 2010 15:52:37 -0700 Subject: savannah back and test coat running Message-ID: hi savannah users, i replaced the fuse on the ebox and the savannah recovered nicely. base pressure is back to 80mTorr with 5sccm of flow. the heaters are ramping back up to process levels, at which point i'll do a chamber coat of 100A of Al2O3. at that point the system is free to run. i'll do a qual run tomorrow (friday). also friday i'm going to pull the Zr precursor to install the newly arrived HfO2 precursor. we have a recipe that i have previously qualified on a savannah S200 in cambridge, so HfO2 should be ready to test quickly. i'll be qualifying the HfO2 precursor over the next week, but if you want to try a run, just let me know. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Thu Sep 9 18:24:06 2010 From: jprovine at stanford.edu (J Provine) Date: Thu, 9 Sep 2010 18:24:06 -0700 Subject: long runs for savannah next week Message-ID: hello all, a user wants to run some long deposition runs in the savannah next week. they intend 3 overnight runs. trying to set a precedent for future excellent ald collaboration and working atmosphere, i wanted to check if this fits with needs of other users. the proposed plan is tuesday 6pm-wednesday 6am wednesday 6pm-thursday apm friday 6pm-saturday 3pm if these long runs interfere with your processing desires please respond and we can all try to work out an appropriate plan. i'm trying to get these out of the way before the quarter starts and ee412 begins; and to avoid taking up the business hours processing. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Fri Sep 24 09:34:01 2010 From: jprovine at stanford.edu (J Provine) Date: Fri, 24 Sep 2010 09:34:01 -0700 Subject: HfO2 installed & base pressure monitoring Message-ID: hello savannah users, two quick notes in case anyone misses the users group meeting this morning (these have also been captured as comments on coral). 1) the base pressure has been rising over the last few weeks on the system. while it used to remain steady at 80mTorr, it is now around 130mTorr (for 5sccm flow). this is likely a sign of the oring wearing out. i have a new one and will replace it over the weekend. please remember to monitor and watch that you reach the same base pressure after your run that you did before your run. this is the best way to check for leaks or issues. 2) a hafnia precursor has been installed and a first test on a HfO2 film has been run. everything looks in order and in conjunction with EE412 characterization runs are coming within the next week. if you want to try your luck pre-data collection i have reasonable confidence in the recipe starting point because of having run it previously at cambridge nanotech. there is no standby recipe listed yet, but i can provide the development recipe for use upon request. j -------------- next part -------------- An HTML attachment was scrubbed... URL: From jprovine at stanford.edu Thu Sep 30 09:37:53 2010 From: jprovine at stanford.edu (J Provine) Date: Thu, 30 Sep 2010 09:37:53 -0700 Subject: ammonia regulator Message-ID: hi savannah enthusiasts, in case you didn't opt to see the comment and problem reports for the savannah through coral...i wanted to forward this note about ammonia use to everyone. if you smell ammonia always close the regulator immediately. your nose is an excellent ammonia sensor and you should smell it early enough to warn you into action. ---------- Forwarded message ---------- From: Date: Thu, Sep 30, 2010 at 9:29 AM Subject: Re: Comment savannah SNF 2010-09-29 18:48:11: NH3 odor To: savannah-pcs at snf.stanford.edu When opening the ammonia regulator, do not tighten it open or open to the stop point. this actually pushes the regulator valve physically beyond its "maximum opening" and causes a leak. instead just open the regulator until it spins freely. there is a lot of play in this middle region and the needle valve controls the ultimate input, so anywhere in the freely turning regime of the regulator knob is fine for operation. i'll do better in the training going forward about making this clear. -------------- next part -------------- An HTML attachment was scrubbed... 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