Test TiN Deposition, shadowing
alexneu at stanford.edu
Tue Sep 7 12:33:05 PDT 2010
Hello Savannah community,
Are there any users who do a TiN process who would be willing running a
blank wafer for me during their next deposition and let me shadow them? I
don't care what thickness you deposit. I'd like to test TiN as a temperature
resistant adhesion layer for gold.
PhD Candidate Electrical Engineering
476 Lomita Mall
Stanford, CA 94305
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