alumina and AlON only

J Provine jprovine at stanford.edu
Wed Dec 7 16:21:12 PST 2011


today during a precursor swap i was unable to get the hafnium precursor to
seal on line 4 properly.  changing the manual valve did not fix the issue.
i will not have a chance to look at this more closely this week.  thus the
savannah is alumina and aluminum oxy-nitride only until shutdown.  if you
have self-clean ald to do, with other chemistries than these, please
contact me to arrange running your samples on fiji1.
j
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