alumina and AlON only
jprovine at stanford.edu
Wed Dec 7 16:21:12 PST 2011
today during a precursor swap i was unable to get the hafnium precursor to
seal on line 4 properly. changing the manual valve did not fix the issue.
i will not have a chance to look at this more closely this week. thus the
savannah is alumina and aluminum oxy-nitride only until shutdown. if you
have self-clean ald to do, with other chemistries than these, please
contact me to arrange running your samples on fiji1.
-------------- next part --------------
An HTML attachment was scrubbed...
More information about the savannah