ALD updates (savannah, fiji-l, and fiji-r) and ALD Spring Retreat

J Provine jprovine at stanford.edu
Thu Feb 17 10:57:44 PST 2011


Hello all,
a brief update on ald status in the snf.

*Savannah*
the savannah is running well and fully functional.  Al2O3, HfO2, ZrO2, and
TiO2 are performing as demonstrated last year.  currently the TMA pulses for
Al2O3 Standard recipe are much larger than necessary and i'm adjusting the
recipe to waste less TMA once i verify that the performance (optical and
electrical) of the deposited film is unchanged by shortening the TMA pulse
duration.
when i get the chance i'm working with the new ammonia line to check on TiN
deposition also, but this has been somewhat slow going currently.
the savannah website has been significantly updated with more
characterization data (Al2O3 published - TiO2, HfO2, ZrO2 still to be
uploaded) and updated instructions to reflect the new ammonia line and new
lessons learned.  i strongly encourage all savannah users to (re)read the
website to ingest these changes:
https://snf.stanford.edu/SNF/equipment/chemical-vapor-deposition/ald/savannah

*Fiji-l & Fiji-r*
We still have no news from the permit proposal we submitted to the fire
marshall's office in mid-december.  no rejection, no approval.  a request
for additional information was met by John Shott several weeks ago.  this
means the fire marshall's has not met its own timeline of replying within 15
business days by a long shot.  snf staff is applying regular contact to
encourage response.  we remain optimistic with extreme caution.

*ALD Spring Retreat 2011*
Cambridge Nanotech is hosting a workshop on ALD at Stanford march 14 and
15th.  more information and registration can be found here:
www.cambridgenanotech.com/spring
this is not a sales meeting or pitch, but instead an open exchange of ALD
knowledge and ideas.  there is a registration fee that includes lunch and
dinner for monday.
An agenda is attached (some time slots may move, but the speakers are set).


Finally, the ald user group meeting for snf which is bi-weekly fridays at
10am in allen 101...is cancelled for february 18 because i need to be in
berkeley that morning for a meeting.  see you march 4th.

thanks,
j
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